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Laser & Optoelectronics Progress, Volume. 59, Issue 19, 1900009(2022)

Study on Femtosecond Laser Assisted Chemical Etching of Transparent Materials

Yu Wang1, Bo Xia1,2、*, Lulu Wan1, and Chunyang Li1
Author Affiliations
  • 1College of Mechanical and Electrical Engineering, Shihezi University, Shihezi 832003, Xinjiang, China
  • 2Industrial Technology Research Institute, XPCC, Shihezi 832003, Xinjiang, China
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    Article index updated: Mar. 15, 2025

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    Yu Wang, Bo Xia, Lulu Wan, Chunyang Li. Study on Femtosecond Laser Assisted Chemical Etching of Transparent Materials[J]. Laser & Optoelectronics Progress, 2022, 59(19): 1900009

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    Paper Information

    Category: Reviews

    Received: Aug. 19, 2021

    Accepted: Oct. 19, 2021

    Published Online: Oct. 12, 2022

    The Author Email: Xia Bo (xiabo@shzu.edu.cn)

    DOI:10.3788/LOP202259.1900009

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology