Optics and Precision Engineering, Volume. 17, Issue 6, 1442(2009)

Design of high g piezoresistive micro-accelerometer

LIU Feng-li* and HAO Yong-ping
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    LIU Feng-li, HAO Yong-ping. Design of high g piezoresistive micro-accelerometer[J]. Optics and Precision Engineering, 2009, 17(6): 1442

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    Paper Information

    Received: Jan. 20, 2009

    Accepted: --

    Published Online: Aug. 28, 2009

    The Author Email: LIU Feng-li (lfengli2003@126.com)

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