Laser & Optoelectronics Progress, Volume. 58, Issue 1, 100004(2021)
Particulate Control Technology Based on Pulsed Laser Deposition
Fig. 3. Schematic diagram of ordinary circular scanning and oscillating scanning and their ablation trajectory diagram[20]. (a) Oscillating scanning; (b) scattered ablation trajectory; (c) ordinary circular scanning(the target rotates about its center); (d) annular ablation trajectory
Fig. 7. Schematic diagram of the picosecond pulse laser and three output pulse shapes[49]. (a) Schematic diagram of the picosecond pulse laser; (b)?(d) output pulse shapes at different voltage durations
Fig. 8. Schematic diagram of the experimental set-up for PLD, in which the velocity selector filter is inserted between the target and the substrate[30]. (a) Deposition process when the filter is in the initial state; (b) deposition process when the filter is in working state
Fig. 13. Experimental setup for a PLD system using plasma reflection technique[57]
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Dai Shoujun, Yu Jin, Mo Zeqiang, Wang Jinduo, He Jianguo, Wang Xiaodong, Meng Jingjing, Wang Baopeng. Particulate Control Technology Based on Pulsed Laser Deposition[J]. Laser & Optoelectronics Progress, 2021, 58(1): 100004
Category: Reviews
Received: May. 26, 2020
Accepted: --
Published Online: Jan. 27, 2021
The Author Email: Yu Jin (jinyu@aoe.ac.cn)