Chinese Optics, Volume. 17, Issue 4, 932(2024)
Design of large-aperture multi-band beam quality detection system
Fig. 1. Schematic diagram of large-aperture multi-band beam quality detection system
Fig. 2. Schematic diagram of the optical structure of the wavefront detection system
Fig. 3. Point diagram of structure matrix of wavefront detection system
Fig. 8. Point diagram of structure matrix of beam uniformity detection system
Fig. 13. Point diagram of structure matrix of beam quality detection system
Fig. 18. Spot images detected by the wavefront detection camera and their wavefront restoration results at λ1 band
Fig. 19. Spot images and the intensity distribution detected by the beam uniformity camera at λ1 band
Fig. 20. Spot images detected by the beam quality detection camera at λ1 band
Table 1. Technical index of mechanical structure of large-aperture multi-band beam quality detection system
View tableView in ArticleTable 1. Technical index of mechanical structure of large-aperture multi-band beam quality detection system
指标 数值 系统整体尺寸 360 mm×200 mm×300 mm（长×宽×高） 系统重量 ≤25 kg
Table 2. Technical index of the wavefront detection system
View tableView in ArticleTable 2. Technical index of the wavefront detection system
指标 数值 视场 ±3' 波段 （1064±3） nm、（1030±3） nm、（635±5） nm 口径 155 mm×140 mm 缩束倍率 1∶10.2 畸变 ≤1% 装调精度（RMS波前） ≤λ/15 工作环境 20 °C±10 °C 10 °C～30 °C光学系统设计结果波前PV值和RMS值的波动范围 PV≤λ/10， RMS≤λ/20 公差指标（RMS波前） ≤λ/8
Table 3. Lens parameters of wavefront detection system
View tableView in ArticleTable 3. Lens parameters of wavefront detection system
表面类型 曲率半径/mm 厚度/mm 材料 标准面 −576.126 −260.000 MIRROR 标准面 −69.040 150.000 MIRROR 标准面 Infinity 141.761 — 标准面 −192.097 4.000 H-ZPK5 标准面 −35.350 2.998 — 标准面 −33.460 3.000 H-F4 标准面 −236.455 3.000 — 标准面 −376.700 3.000 H-LAF3B 标准面 −116.680 30.000 —
Table 4. Tolerance of wavefront detection system
View tableView in ArticleTable 4. Tolerance of wavefront detection system
No. 光圈数 厚度/mm 透镜偏心/mm 透镜倾斜/（´） 折射率 阿贝误差% 镜1 3 0.05 0.01 0.6 0.001 0.3 镜2 3 0.05 0.01 0.6 0.001 0.3 镜3 3 0.05 0.03 1.5 0.001 0.3 镜4 3 0.05 0.03 1.5 0.001 0.3 镜5 3 0.05 0.03 1.5 0.001 0.3
Table 5. Monte Carlo analysis results for λ1、λ2、λ3 in wavefront detection system
View tableView in ArticleTable 5. Monte Carlo analysis results for λ1、λ2、λ3 in wavefront detection system
指标 数值 λ1 λ2 λ3 蒙特卡洛分析/% 90 90 90 RMS波前 0.0931λ1 0.0922λ2 0.1303λ3
Table 6. Technical index of beam uniformity detection system
View tableView in ArticleTable 6. Technical index of beam uniformity detection system
指标 数值 缩束倍率 1:4.5 畸变 ≤1% 均匀性检测指标 ≥0.8 10 °C～30 °C光学系统设计结果波前 PV值和RMS值的波动范围 PV≤λ/10，RMS≤λ/20 公差指标（RMS波前） ≤λ/8
Table 7. Lens parameters of beam uniformity detection subsystem
View tableView in ArticleTable 7. Lens parameters of beam uniformity detection subsystem
表面类型 曲率半径/mm 厚度/mm 材料 标准面 98.136 4.000 H-LAF3B 标准面 −61.232 2.000 — 标准面 −54.883 2.000 H-F4 标准面 32.964 5.984 — 标准面 38.503 4.000 H-ZPK5 标准面 −172.545 92.637 — 标准面 Infinity 27.515 — 标准面 557.963 1.000 H-F4 标准面 9.375 0.800 — 标准面 11.436 2.000 H-ZPK5 标准面 −12.687 10.000 —
Table 8. Monte Carlo analysis results for λ1、λ2、λ3 in beam uniformity detection system
View tableView in ArticleTable 8. Monte Carlo analysis results for λ1、λ2、λ3 in beam uniformity detection system
指标 数值 λ1 λ2 λ3 蒙特卡洛分析/% 90 90 90 RMS波前 0.1101λ1 0.1172λ2 0.1439λ3
Table 9. Technical index of beam quality detection system
View tableView in ArticleTable 9. Technical index of beam quality detection system
指标 数值 光束质量β因子 β≤1.3 10 °C～30 °C光学系统设计结果波前PV值和RMS值的波动范围 PV≤λ/10，RMS≤λ/20
Table 10. Lens parameters of beam quality detection subsystem
View tableView in ArticleTable 10. Lens parameters of beam quality detection subsystem
表面类型 曲率半径/mm 厚度/mm 材料 标准面 88.158 4.000 H-LAF3B 标准面 −54.625 2.090 — 标准面 −44.584 2.000 H-F4 标准面 37.738 2.121 — 标准面 35.877 4.000 H-ZPK5 标准面 −779.682 93.327 —
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Cai LIU, Xin YU, Guo-tao PAN, Guo-qiang HE, Xiao-long NI, Su-ping BAI. Design of large-aperture multi-band beam quality detection system[J]. Chinese Optics, 2024, 17(4): 932
Received: Dec. 20, 2023
Accepted: --
Published Online: Aug. 9, 2024
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