Semiconductor Optoelectronics, Volume. 45, Issue 2, 247(2024)

Fabrication and Performance of Flat MIM Capacitors with Ta/Ta2O5/Cu Structure

LIANG Taohua1,2, YONG Huan3, JI Jingxin3, YANG Shiqing2,3, and WANG Yan3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    References(15)

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    LIANG Taohua, YONG Huan, JI Jingxin, YANG Shiqing, WANG Yan. Fabrication and Performance of Flat MIM Capacitors with Ta/Ta2O5/Cu Structure[J]. Semiconductor Optoelectronics, 2024, 45(2): 247

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    Paper Information

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    Received: Nov. 13, 2023

    Accepted: --

    Published Online: Aug. 14, 2024

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2023111304

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