Semiconductor Optoelectronics, Volume. 45, Issue 2, 247(2024)
Fabrication and Performance of Flat MIM Capacitors with Ta/Ta2O5/Cu Structure
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LIANG Taohua, YONG Huan, JI Jingxin, YANG Shiqing, WANG Yan. Fabrication and Performance of Flat MIM Capacitors with Ta/Ta2O5/Cu Structure[J]. Semiconductor Optoelectronics, 2024, 45(2): 247
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Received: Nov. 13, 2023
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Published Online: Aug. 14, 2024
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