High quality 6-inch single-crystalline AlN template for E-mode HEMT power device

Zhiwen Liang; Shangfeng Liu; Ye Yuan; Tongxin Lu; Xiaopeng Li; Zirong Wang; Neng Zhang; Tai Li; Xiangdong Li; Qi Wang; Shengqiang Zhou; Kai Kang; Jincheng Zhang; Yue Hao; Xinqiang Wang

doi:10.1088/1674-4926/24100041

Journal of Semiconductors, Volume. 46, Issue 3, 032501(2025)

High quality 6-inch single-crystalline AlN template for E-mode HEMT power device

Zhiwen Liang¹, Shangfeng Liu^1,3,7, Ye Yuan^1、*, Tongxin Lu^1,7, Xiaopeng Li¹, Zirong Wang⁶, Neng Zhang⁶, Tai Li^1,7, Xiangdong Li^2、**, Qi Wang⁵, Shengqiang Zhou⁴, Kai Kang⁶, Jincheng Zhang^2,8, Yue Hao^2,8, and Xinqiang Wang^1,5,7、***

Author Affiliations

¹Songshan Lake Materials Laboratory, Dongguan 523808, China

²Guangzhou Wide Bandgap Semiconductor Innovation Center, Guangzhou Institute of Technology, Xidian University, Guangzhou 510555, China

³School of Physical Sciences, Great Bay University, Dongguan 523808, China

⁴Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328, Dresden, Germany

⁵Dongguan Institute of Opto-Electronics Peking University, Dongguan 523808, China

⁶Sinopatt. Technology Co., Ltd, Songshan Lake, Dongguan 523808, China

⁷State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Nano-Optoelectronics Frontier Center of Ministry of Education (NFC-MOE), Peking University, Beijing 100871, China

⁸State Key Laboratory of Wide Bandgap Semiconductor Devices and Integrated Technology, School of Microelectronics, Xidian University, Xi’an 710071, China

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References(27)

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Zhiwen Liang, Shangfeng Liu, Ye Yuan, Tongxin Lu, Xiaopeng Li, Zirong Wang, Neng Zhang, Tai Li, Xiangdong Li, Qi Wang, Shengqiang Zhou, Kai Kang, Jincheng Zhang, Yue Hao, Xinqiang Wang. High quality 6-inch single-crystalline AlN template for E-mode HEMT power device[J]. Journal of Semiconductors, 2025, 46(3): 032501

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Paper Information

Category: Research Articles

Received: Oct. 30, 2024

Accepted: --

Published Online: Apr. 27, 2025

The Author Email: Ye Yuan (YYuan), Xiangdong Li (XDLi), Xinqiang Wang (XQWang)

DOI:10.1088/1674-4926/24100041

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