Chinese Journal of Lasers, Volume. 47, Issue 6, 604004(2020)

Measurement Error and Fitting Accuracy of Fringe Structured Light System

Wang Xiao1,2, Liu Yuliang1,2、*, and Li Liyan1,2
Author Affiliations
  • 1Optoelectronic System Laboratory, Institute of Semiconductors, Chinese Academy of Sciences,Beijing 100083, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences,Beijing 100049, China
  • show less
    Figures & Tables(18)
    Height measurement principle for fringe projection structured light system
    An error determination method based on measurement environment
    Fringe projection structured light measurement system. (a) Schematic; (b) site photo
    Height measurement error variation with space and time. (a) Horizontal height measurement error at certain position; (b) height measurement error variation of any three points with space; (c) height measurement error variation of any three points with time
    Height measurement error. (a) Average and standard deviation; (b) root-mean-square error
    Fitting result for different probability distributions. (a) Density graph; (b) probability graph
    Parameter calculation results under normal distribution
    Plane measurement error acquisition. (a) Site photo; (b) point extract result
    Plane measurement error distribution. (a) Scatter diagram; (b) histogram
    Plane fitting result. (a) Without noise; (b) with noise
    Plane data acquisition. (a) Site photo; (b) point cloud image
    Error from simulation and actual results
    Cylinder fitting results. (a) Without noise; (b) with noise
    Cylinder data acquisition. (a) Site photo; (b) point cloud image
    • Table 1. 3D camera performance parameters

      View table

      Table 1. 3D camera performance parameters

      Scanning speed /(frame·s-1)Resolution /pixelCenterdistance /mmMeasurementrange /mmField of view /(mm×mm)Repeatability /μm
      2.13.2×1061500±300600×45075
    • Table 2. Calibration plane specifications

      View table

      Table 2. Calibration plane specifications

      Points perrowPoints percolumnDimension /(mm×mm)Distance betweencenters /mmPointradius /mmAccuracy /μm
      77200×200256.25±30
    • Table 3. Plane resolution at different height values

      View table

      Table 3. Plane resolution at different height values

      Height /mField of view /(mm×mm)Resolution /mmNumber of points /106
      1.2550×4100.2660.814
      1.4630×4700.3050.620
      1.6720×5400.3500.472
      1.8810×6050.3920.374
    • Table 4. Model parameter error between simulated and measured data

      View table

      Table 4. Model parameter error between simulated and measured data

      ParameterSimulated resultMeasurement result
      Radius /mm186.395±0.217186.131±0.123
    Tools

    Get Citation

    Copy Citation Text

    Wang Xiao, Liu Yuliang, Li Liyan. Measurement Error and Fitting Accuracy of Fringe Structured Light System[J]. Chinese Journal of Lasers, 2020, 47(6): 604004

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Measurement and metrology

    Received: Dec. 6, 2019

    Accepted: --

    Published Online: Jun. 3, 2020

    The Author Email: Yuliang Liu (ylliu@semi.ac.cn)

    DOI:10.3788/CJL202047.0604004

    Topics