Fig. 1. Two-dimensional hybrid position coding disk^［28］

Fig. 2. Flow chart of decoding

Fig. 3. Schematic diagram of measuring angle system based on two-dimensional hybrid position encoding

Fig. 4. Schematic diagram of measuring angle based on two-dimensional hybrid position encoding

Fig. 5. Measurement system of measuring angle error based on two-dimensional hybrid position encoding

Fig. 6. Error curves of angle measurement between proposed method and multi-tooth indexing table

Fig. 7. Measurement system of direct drive turntable angle positioning error based on two-dimensional hybrid position encoding

Fig. 8. Measurement curves of angle positioning error of direct drive turntable based on proposed method