Chinese Journal of Lasers, Volume. 42, Issue 1, 108002(2015)

Active Control Technology to Correct the Quality of the Grating Wave-Front

Yang Chao1,2、*, Yu Haili1, Zhang Shanwen1, Yu Hongzhu1, Li Xiaotian1, and Tang Yuguo1
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    Yang Chao, Yu Haili, Zhang Shanwen, Yu Hongzhu, Li Xiaotian, Tang Yuguo. Active Control Technology to Correct the Quality of the Grating Wave-Front[J]. Chinese Journal of Lasers, 2015, 42(1): 108002

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    Paper Information

    Category: measurement and metrology

    Received: Jun. 13, 2014

    Accepted: --

    Published Online: Dec. 29, 2014

    The Author Email: Chao Yang (yangchaoby@sina.com)

    DOI:10.3788/cjl201542.0108002

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