Chinese Optics Letters, Volume. 8, Issue s1, 114(2010)
Spectroscopic imaging ellipsometry for characterization of nanofilm pattern on Si substrate
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Yonghong Meng, She Chen, Gang Jin, "Spectroscopic imaging ellipsometry for characterization of nanofilm pattern on Si substrate," Chin. Opt. Lett. 8, 114 (2010)
Received: Nov. 20, 2009
Accepted: --
Published Online: May. 14, 2010
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