Chinese Optics Letters, Volume. 8, Issue s1, 114(2010)

Spectroscopic imaging ellipsometry for characterization of nanofilm pattern on Si substrate

Yonghong Meng1,2, She Chen1,2, and Gang Jin1
Author Affiliations
  • 1Key Laboratory of Microgravity (National Microgravity Laboratory), Institute of Mechanics, Chinese Academy of Sciences, Beijing 100190, China
  • 2Graduate University of Chinese Academy of Sciences, Beijing 100049, China
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    CLP Journals

    [1] Fan Zhang, Cong Wang, Kai Yin, Xinran Dong, Yuxin Song, Yaxiang Tian, Ji’an Duan, "Investigation on optical and photoluminescence properties of organic semiconductor Al-Alq3 thin films for organic light-emitting diodes application," Chin. Opt. Lett. 15, 111602 (2017)

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    Yonghong Meng, She Chen, Gang Jin, "Spectroscopic imaging ellipsometry for characterization of nanofilm pattern on Si substrate," Chin. Opt. Lett. 8, 114 (2010)

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    Paper Information

    Received: Nov. 20, 2009

    Accepted: --

    Published Online: May. 14, 2010

    The Author Email:

    DOI:10.3788/COL201008s1.0114

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