Chinese Journal of Lasers, Volume. 38, Issue s1, 107003(2011)
Influences of Deposition Pressure on Structures and Optical Properties of Sputtered Aluminum Nitride Films
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Huang Meidong, Du Shan, Wang Lige, Zhang Linlin. Influences of Deposition Pressure on Structures and Optical Properties of Sputtered Aluminum Nitride Films[J]. Chinese Journal of Lasers, 2011, 38(s1): 107003
Paper Information
Category: materials and thin films
Received: Jul. 18, 2011
Accepted: --
Published Online: Jan. 6, 2012
The Author Email: Meidong Huang (scmdfxwf@yahoo.com)
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