Application of Three-Layer Silicon Nitride Antireflection Coatings in Mono-Crystalline Silicon Solar Cells

Xinjian Ma; Zhihua Si; Dong Yang; Tao Lin; Shuaichen Feng

doi:10.3788/LOP55.061602

Laser & Optoelectronics Progress, Volume. 55, Issue 6, 061602(2018)

Application of Three-Layer Silicon Nitride Antireflection Coatings in Mono-Crystalline Silicon Solar Cells

Xinjian Ma^1、1;, Zhihua Si^1、1;, Dong Yang^1、1;, Tao Lin^2、2;, and Shuaichen Feng^3、3;

Author Affiliations

¹ Information Technology Department, Lhasa Normal College, Lhasa, Tibet 850000, China

² School of Automation and Information Engineering, Xi'an University of Technology,Xi'an, Shaanxi 710048, China

³ Yangzhou Xinjing Photovoltaic Technology Co., Ltd., Yangzhou, Jiangsu 225653, China

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Figures & Tables(9)

Fig. 1. Simulated reflectivity curves of solar cells with double-layer and three-layer SiNX coatings. (a) 300-1200 nm; (b) 300-600 nm

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Fig. 2. Simulated external quantum efficiency curves of solar cells with double-layer and three-layer SiNX coatings

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Fig. 3. Simulated internal quantum efficiency curves of solar cells with double-layer and three-layer SiNX coatings

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Fig. 4. Simulated conversion efficiency results of solar cells with double-layer and three-layer SiNX coatings

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Fig. 5. Reflectivity testing curves of solar cells with double-layer and three-layer SiNX coatings

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Table 1. Simulation scheme of PC1D
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Table 1. Simulation scheme of PC1D
Scheme d₁ /nm n₁ d₂ /nm n₂ d₃ /nm n₃
A 60 2.05 15 2.25
B 50 2.05 25 2.25
C 40 2.05 35 2.25
D 55 2 15 2.2 5 2.3
E 45 2 25 2.2 5 2.3
F 35 2 35 2.2 5 2.3

Table 2. Experimental scheme of solar cell

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Table 2. Experimental scheme of solar cell

Type of solar cells	NH₃/SiH₄			Time /s
Type of solar cells	Outer layer	Middle layer	Internal layer	Outer layer	Middle layer	Internal layer
Withdouble-layer SiN_X coating	55∶8		38∶8	420		240
Withthree-layer SiN_X coating	65∶8	50∶9	40∶95	525	200	100

Table 3. Minority carrier lifetime testing results of solar cells with double-layer and three-layer SiNX coatings(μs)
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Table 3. Minority carrier lifetime testing results of solar cells with double-layer and three-layer SiNX coatings(μs)
Type ofsolar cells Beforecoating After coatingand sintering
Withdouble-layer SiN_X coating 15 22
Withthree-layer SiN_X coating 16 25

Table 4. Electrical characteristics of solar cells with double-layer and three-layer SiNX coatings
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Table 4. Electrical characteristics of solar cells with double-layer and three-layer SiNX coatings
Type of solar cells V_oc /V I_sc /A F_F /% E_ff /% R_s /Ω R_sh /Ω
With double-layer SiN_X coating 0.6395 9.301 80.38 19.53 0.0017 336.7
With three-layer SiN_X coating 0.6431 9.368 79.45 19.58 0.0025 110.4

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Xinjian Ma, Zhihua Si, Dong Yang, Tao Lin, Shuaichen Feng. Application of Three-Layer Silicon Nitride Antireflection Coatings in Mono-Crystalline Silicon Solar Cells[J]. Laser & Optoelectronics Progress, 2018, 55(6): 061602

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Paper Information

Category: Materials

Received: Nov. 7, 2017

Accepted: --

Published Online: Sep. 11, 2018

The Author Email: Xinjian Ma (932594765@qq.com)

DOI:10.3788/LOP55.061602

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Simulation scheme of PC1D

Table 1. Simulation scheme of PC1D

Table 2. Experimental scheme of solar cell

Table 2. Experimental scheme of solar cell

Table 3. Minority carrier lifetime testing results of solar cells with double-layer and three-layer SiNX coatings(μs)

Table 3. Minority carrier lifetime testing results of solar cells with double-layer and three-layer SiNX coatings(μs)

Table 4. Electrical characteristics of solar cells with double-layer and three-layer SiNX coatings

Table 4. Electrical characteristics of solar cells with double-layer and three-layer SiNX coatings