Fig. 1. Schematic diagram of simultaneous measurement of six-degree-of-freedom errors in precision rotary tables based on absolute measurement

Fig. 2. Samples of micro structure feature

Fig. 3. Two-dimensional feature analysis of long single engraved line. (a) Ideal situation; (b) actual situation

Fig. 4. Three-dimensional feature analysis of micro structure feature

Fig. 5. Structure of multi-wavelength microscopic phase-shifting interferometry system

Fig. 6. Process of absolute measurement of micro structure feature surface.

Fig. 7. Model of three-degree-of-freedom errors based on long single line features. (a) Long single engraving line characteristics; (b) geometrical relationship

Fig. 8. Six-degree-of-freedom errors model of precision rotating axis

Fig. 9. Experimental platform for simultaneous measurement of six-degree-of-freedom errors of precision rotary stage

Fig. 10. Measurement results of standard single-engraved line by MWPSIM

Fig. 11. Instantaneous absolute measurement results of micro structure feature

Fig. 12. Measurement results of angular positioning error of air flotation rotary table

Fig. 13. Measurement results of radial errors of air flotation rotary table. (a) δx; (b) δy; (c) δx-y

Fig. 14. Measurement results of tilt errors of air flotation rotary table. (a) εx; (b) εy; (c) εx-y

Fig. 15. Measurement result of axial error of air flotation rotary table