Acta Optica Sinica, Volume. 20, Issue 8, 1065(2000)

Expanding Depth Measurement Range by White-Light Phase-Shifting Interferometry

[in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(8)

    [2] [2] Matsui K, Kawata S. Fringe-scanning white-light microscope for surface profile measurement and material identification. Proc. SPIE, 1992, 1720:124~132

    [3] [3] Strand T C, Katzir Y. Extended unambiguous range interferometry. Appl. Opt., 1987, 26(19):4274~4281

    [4] [4] Schwider J, Zhou L. Dispersive interferometric profilometer. Opt. Lett., 1994, 19(13):995~997

    [5] [5] Cheng Y, Wyant J C. Two-wavelength phase shifting interferometry. Appl. Opt., 1984, 23(24):4539~4543

    [6] [6] Cheng Y, Wyant J C. Multiple-wavelength phase-shifting interferometry. Appl. Opt., 1985, 24(6):804~807

    [7] [7] Biegen J F. Step height measurement range extended for an interference microscope utilizing the obliquity effect. Proc. SPIE, Surface Characterization and Testing II, 1989, 1164, 85~90

    [8] [8] Greivenkamp J E. Sub-Nyquist interferometry. Appl. Opt., 1987, 26(24):5245~5258

    [9] [9] Greivenkamp J E, Sullivan K G, Palum R J. Resolving interferometric step height measurement ambiguities using a priori information. Proc. SPIE, Surface Characterization and Testing II, 1989, 1164, 79~84

    CLP Journals

    [1] Shi Lingna, Huang Shanglian, Sun Jiyong, Zhang Zhihai, Zhang Jie, Wei Wei. Analysis and Experiment of Surface Bending of Grating Light Modulator[J]. Acta Optica Sinica, 2009, 29(4): 869

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Expanding Depth Measurement Range by White-Light Phase-Shifting Interferometry[J]. Acta Optica Sinica, 2000, 20(8): 1065

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 2, 1998

    Accepted: --

    Published Online: Aug. 9, 2006

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