Acta Optica Sinica, Volume. 42, Issue 17, 1712001(2022)
Review of Research on Computer-Aided Deflectometric Measurement Technology
Fig. 1. Geometric model of deflectometric measurement. (a) Physical drawing; (b) schematic diagram
Fig. 8. Experimental results of measured surface [35]. (a) Measurement result of ZYGO interferometer; (b) measurement result based on three-coordinate calibration; (c) measurement result after first-step correction; (d) measurement result after second-step correction; (e) residual error between measurement result after first-step correction and measurement result based on three-coordinate calibration; (f) residual error between measurement result after second-step correction and measurement result based on three-coordinate calibration
Fig. 12. Photo of experimental measurement with infinite deflectometric system[58]. (a) Tested convex spherical optic with 50-mm diameter aperture; (b) interferogram acquired with Zygo interferometer; (c) photo of infinite deflectometric system
Fig. 13. Computer-aided deflectometric system for reflective convex surface measurement[35]
Fig. 14. Annular steps[69]. (a) Photo of steps; (b) fringe pattern reflected by steps
Fig. 16. Computer-aided deflectometric system for transmitted multisurface measurement[77]
Fig. 17. Reconstruction results of front and rear surfaces of freeform refractive lens[77]
Fig. 20. Comparison between measurement results obtained by off-axis deflectometric microscope system and Wyko profilometer[80]. (a) Surface roughness measured by off-axis deflectometric microscope system; (b) surface roughness measured by Wyko profilometer; (c) line profile comparison in x direction; (d) line profile comparison in y direction
Fig. 23. Fringe coding process in instantaneous deflectometry based on frequency carrier[86]
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Zhendong Wu, Daodang Wang, Yang Ruan, Rongguang Liang. Review of Research on Computer-Aided Deflectometric Measurement Technology[J]. Acta Optica Sinica, 2022, 42(17): 1712001
Category: Instrumentation, Measurement and Metrology
Received: May. 11, 2022
Accepted: Jun. 30, 2022
Published Online: Sep. 16, 2022
The Author Email: Wang Daodang (wangdaodang@sina.com)