A Composite Grating Phase-Measuring Profilometry Based on Mixed Filtering Window

An Haihua; Cao Yiping; Li Hongmei; Wu Haitao

doi:10.3788/CJL202047.0604007

Chinese Journal of Lasers, Volume. 47, Issue 6, 604007(2020)

A Composite Grating Phase-Measuring Profilometry Based on Mixed Filtering Window

An Haihua¹, Cao Yiping^1、*, Li Hongmei^1,2, and Wu Haitao¹

Author Affiliations

¹Department of Opto-Electronics, Sichuan University, Chengdu, Sichuan 610064, China

²College of Physics and Engineering, Chengdu Normal University, Chengdu, Sichuan 611130, China

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An Haihua, Cao Yiping, Li Hongmei, Wu Haitao. A Composite Grating Phase-Measuring Profilometry Based on Mixed Filtering Window[J]. Chinese Journal of Lasers, 2020, 47(6): 604007

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Paper Information

Category: Measurement and metrology

Received: Dec. 11, 2019

Accepted: --

Published Online: Jun. 3, 2020

The Author Email: Yiping Cao (ypcao@scu.edu.cn)

DOI:10.3788/CJL202047.0604007

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology