Simulated Close-Loop Target Tracking System

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 33, Issue 6, 743(2006)

[in Chinese]^1,2、*, [in Chinese]², [in Chinese]², [in Chinese]², [in Chinese]², [in Chinese]², [in Chinese]², [in Chinese]², [in Chinese]², [in Chinese]², [in Chinese]², and [in Chinese]¹

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[1] Bao Jianfei, Huang Lihua, Zeng Aijun, Ren Bingqiang, Yang Baoxi, Peng Xuefeng, Hu Xiaobang, Huang Huijie. Study on Beam Stabilization Technique in Lithography Illumination System[J]. Chinese Journal of Lasers, 2012, 39(9): 908004

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Simulated Close-Loop Target Tracking System[J]. Chinese Journal of Lasers, 2006, 33(6): 743

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Paper Information

Category:

Received: Jul. 20, 2005

Accepted: --

Published Online: Jun. 13, 2006

The Author Email: (GCHL@263.net)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology