Journal of Synthetic Crystals, Volume. 53, Issue 2, 210(2024)
Analysis and Review of Influencing Factors of SiC Homo-Epitaxial Wafers Quality
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GUO Yu, LIU Chunjun, ZHANG Xinhe, SHEN Pengyuan, ZHANG Bo, LOU Yanfang, PENG Tonghua, YANG Jian. Analysis and Review of Influencing Factors of SiC Homo-Epitaxial Wafers Quality[J]. Journal of Synthetic Crystals, 2024, 53(2): 210
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Received: May. 29, 2023
Accepted: --
Published Online: Jul. 30, 2024
The Author Email: Chunjun LIU (liuchunjun@tankeblue.cn)
CSTR:32186.14.
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