Optical properties of ion-implanted Si by CO<sub>2</sub> intense-laser annealing

Acta Optica Sinica, Volume. 2, Issue 3, 285(1982)

Optical properties of ion-implanted Si by CO₂ intense-laser annealing

LI YUANHENG¹ and LI YUANHENG²

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¹[in Chinese]

²[in Chinese]

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LI YUANHENG, LI YUANHENG. Optical properties of ion-implanted Si by CO₂ intense-laser annealing[J]. Acta Optica Sinica, 1982, 2(3): 285

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Category: Rapid communications

Received: May. 4, 1981

Accepted: --

Published Online: Sep. 15, 2011

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