Laser & Optoelectronics Progress, Volume. 61, Issue 12, 1211006(2024)
Multi-Defect Classification and Localization of Through-Silicon Vias Based on Active Infrared Excitation
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Lei Nie, Jianglin Liu, Ming Zhang, Renxing Luo. Multi-Defect Classification and Localization of Through-Silicon Vias Based on Active Infrared Excitation[J]. Laser & Optoelectronics Progress, 2024, 61(12): 1211006
Category: Imaging Systems
Received: Jul. 24, 2023
Accepted: Sep. 7, 2023
Published Online: May. 20, 2024
The Author Email: Lei Nie (leinie@hbut.edu.cn)
CSTR:32186.14.LOP231793