Laser & Optoelectronics Progress, Volume. 61, Issue 12, 1211006(2024)

Multi-Defect Classification and Localization of Through-Silicon Vias Based on Active Infrared Excitation

Lei Nie1、*, Jianglin Liu1, Ming Zhang1, and Renxing Luo2
Author Affiliations
  • 1School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, Hubei , China
  • 2Hubei Taihe Electric Co., Ltd., Xiangyang441057, Hubei , China
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    References(20)

    [3] Chen Y, Zhang P, Xia K L. Process defect diagnosis and analysis of the TSV[J]. Semiconductor Technology, 43, 473-479(2018).

    [7] Wu Y Q, Zhao L Y, Yuan Y B et al. Research status and prospect of PCB defect detection algorithm based on machine vision[J]. Chinese Journal of Scientific Instrument, 43, 1-17(2022).

    [13] Zhen J P, Guo Q, Zhou J. Simulation of heat transfer in multi-layered medium[J]. Applied Physics, 9, 7-12(2019).

    [19] Chen W H, He J, Liu G. Hyperspectral image classification based on convolution neural network with attention mechanism[J]. Laser & Optoelectronics Progress, 59, 1811001(2022).

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    Lei Nie, Jianglin Liu, Ming Zhang, Renxing Luo. Multi-Defect Classification and Localization of Through-Silicon Vias Based on Active Infrared Excitation[J]. Laser & Optoelectronics Progress, 2024, 61(12): 1211006

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    Paper Information

    Category: Imaging Systems

    Received: Jul. 24, 2023

    Accepted: Sep. 7, 2023

    Published Online: May. 20, 2024

    The Author Email: Lei Nie (leinie@hbut.edu.cn)

    DOI:10.3788/LOP231793

    CSTR:32186.14.LOP231793

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