Journal of Synthetic Crystals, Volume. 51, Issue 11, 1973(2022)

Research Progress of Dislocations in SiC Single Crystal

ZHANG Jiaxin*, PENG Yan, CHENG Xiufang, XIE Xuejian, YANG Xianglong, HU Xiaobo, and XU Xiangang
Author Affiliations
  • [in Chinese]
  • show less

    As the representative of the third generation semiconductor materials, SiC has excellent physical and chemical properties. With the development of materials and applications, SiC substrates are increasingly important in aerospace power supply, electric vehicles, smart power grids, rail transit, industrial motors and other fields. Compared with the first generation of semiconductor materials such as Si and the second generation of semiconductor materials such as GaAs, the quality of SiC substrate which has a lot of room for improvement, is the current research and development and industry hot spot. The detection and reduction of SiC single crystal defects, especially one-dimensional dislocation defects, is an important research content in the last ten years. This review focuses on the formation of dislocation in SiC, dislocation detection techniques, methods of reducing dislocation density and the optimization level of dislocation in SiC single crystal in recent years. Finally, the paper puts forward the direction of SiC's further breakthrough and development.

    Tools

    Get Citation

    Copy Citation Text

    ZHANG Jiaxin, PENG Yan, CHENG Xiufang, XIE Xuejian, YANG Xianglong, HU Xiaobo, XU Xiangang. Research Progress of Dislocations in SiC Single Crystal[J]. Journal of Synthetic Crystals, 2022, 51(11): 1973

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: May. 18, 2022

    Accepted: --

    Published Online: Jan. 3, 2023

    The Author Email: Jiaxin ZHANG (jiaxin_zhang@mail.sdu.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics