Chinese Optics Letters, Volume. 8, Issue s1, 44(2010)
In situ ellipsometric monitoring of complex multilayer designs
[1] [1] H. A. Macleod, The Essential Macleod, Thin Film Center Inc.
[2] [2] TFCalc by Software Spectra, Inc., 14025 N. W. Harvest Lane, Portland, OR 97229 USA.
[3] [3] A. V. Tikhonravov and M. K. Trubetskov, OptiLayer Thin Film, OptiLayer Consulting Ltd., software copy-right, 1997-2003
[4] [4] B. T. Sullivan and J. A. Dobrovolski, Appl. Opt. 35, 5484 (1996).
[5] [5] A. V. Tikhonravov, M. K. Trubetskov, and G.W. DeBell, Appl. Opt. 35, 5493 (1996).
[6] [6] H. A. Macleod, Appl. Opt. 28, 2886 (1989).
[7] [7] H. A. Macleod, Thin f ilm optical f ilters (Institute of Physics Publishing, Bristol, 2001).
[8] [8] B. T. Sullivan, G. A. Clarke, T. Akiyama, N. Osborne, M. Ranger, J. A. Dobrowolski, and L. Howe, Appl. Opt. 39, 157 (2000).
[9] [9] M. Kobayashi and H. Terui, Appl. Opt. 22, 3121 (1983).
[10] [10] R. R. Willey, Practical design and Production of thin Films. (Marcel Dekker, Inc. New York, 2002).
[11] [11] D. R. Gibson, P. H. Lissberg, I. Salter, and D. G. Sparks, Opt. Acta 29, 221 (1982).
[12] [12] H. A. Macleod and E. Pelletier, Opt. Acta 24, 907 (1977).
[13] [13] F. Zhao, Appl. Opt. 24, 33339 (1985).
[14] [14] B. Vidal, A. Fornier, and E. Pellitier, Appl. Opt. 18, 3851 (1979).
[15] [15] R. Rabady, K. Zinoviev, and I. Arutsky, Appl. Opt. 43, 143 (2004).
[16] [16] B. Badoil, F. Lemarchand, M. Cathelinaud, and M. Lequime, Appl. Opt. 46, 4294 (2007).
[17] [17] R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarised Light (North Holland, Amsterdam, 1977).
[18] [18] E. Wolf, Progress in Optics (Elsevier, Amsterdam, 2000).
[19] [19] H. G. Tompkins and E. A. Irene, Handbook of Ellipsometry (NY & Springer, Heidelberg, 2005).
[20] [20] H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (John Wiley & Sons Ltd., chichester, 2007).
[21] [21] B. D. Johs, J. Hale, C. M. Herzinger, T. E. Tiwald, and J. A. Woollam, Proc. SPIE 4449, 41 (2001).
[22] [22] D. E. Morton, B. Johs, and J. Hale, in Proceedings of SVC 45th Annual Tech. 299 (2002).
[23] [23] J. N. Hilfiker, J. S. Hale, B. D. Johs, T. E. Tiwald, R. A. Synowicki, C. L. Bungay, and J. A. Woollam, in Proceedings of SVC 44th Annual Tech. 295 (2001).
[24] [24] C. Bungay, J. Hilfiker, M. Liphardt, and R. Synowicki, Vacuum and Thin Film 1999.
[25] [25] S. Dligatch, R. P. Netterfield, and B. J. Martin, Thin Solid Films 455, 376 (2004).
[26] [26] S. Dligatch, R. P. Netterfield, D. J. Drage, and P. S. Fairman, in Proceedings of Optical Interference Coatings Conference of the Optical Society of America (2001).
[27] [27] J. N. Hilfiker, C. L. Bungay, R. A. Synowicki, T. E. Tiwald, C. M. Herzinger, B. Johs, G. K. Pribil, and J. A. Woollam, J. Vac. Sci. Technol. A 21, 1103 (2003).
[28] [28] R. W. Collins, J. Koh, H. Fujiwara, P. I. Rovira, A. S. Ferlauto, J. A. Zapien, C. R. Wronski, and R. Messier, Appl. Surf. Sci., 154-155, 217 (2000).
[29] [29] H. Tompkins, A User’s Guide to Ellipsometry (Academic Press, San Diego, 1993).
[30] [30] M. Yamamoto and O. S. Heavens, Surf. Sci. 96, 202 (1980).
[31] [31] R. M. A. Azzam, Proc. SPIE 2873, 1 (1996).
[32] [32] E. Masetti, M. Motecchi, R. Larciprete, and S. Cozzi, Appl. Opt. 35, 5626 (1996).
[33] [33] S. N. Jasperson and S. E. Schnatterly, Rev. Sci. Instrum. 40, 761 (1969).
[34] [34] B. D. Johs, J. Hale, N. J. Ianno, C. M. Herzinger, T. E. Tiwald, and J. A.Woollam, Proc. SPIE 4449, 41 (2001).
[35] [35] R. P. Netterfield, P. J. Martin, W. G. Sainty, R. M. Duffy, and C. G. Pacey, Rev. Sci. Instrum. 56, 1995 (1985).
[36] [36] P. S. Hauge and F. H. Dill, IBM J. Res. Develop. 17, 472 (1973).
[37] [37] P. J. Martin, H. A. Macleod, R. P. Netterfield, C. G. Pacey, and E. G. Sainty, Appl. Opt. 22, 178 (1983).
[38] [38] R. P. Netterfield, P. J. Martin, C. G. Pacey,W. G. Sainty, D. R. McKenzie, and G. Auchterlonie, J. Appl. Phys. 66, 1805 (1989).
[39] [39] R. P. Netterfield, P. J. Martin, and W. G. Sainty, Appl. Opt. 25, 3808 (1986).
[40] [40] B. Johs, C. Herzinger, J. H. Dinan, A. Cornfeld, J. D. Benson, D. Doctor, G. Olson, I. Ferguson, M. Pelczynski, P. Chow, C. H. Kuo, and S. Johnson, Thin Solid Films 313, 490 (1998).
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Svetlana Dligatch, "In situ ellipsometric monitoring of complex multilayer designs," Chin. Opt. Lett. 8, 44 (2010)
Received: Oct. 30, 2009
Accepted: --
Published Online: May. 14, 2010
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