Chinese Optics Letters, Volume. 8, Issue s1, 44(2010)

In situ ellipsometric monitoring of complex multilayer designs

Svetlana Dligatch
Author Affiliations
  • Commonwealth Scientific and Industrial Research Organisation, Materials Science and Engineering, PO Box 218, Lindf ield, NSW 2070, Australia
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    Svetlana Dligatch, "In situ ellipsometric monitoring of complex multilayer designs," Chin. Opt. Lett. 8, 44 (2010)

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    Paper Information

    Received: Oct. 30, 2009

    Accepted: --

    Published Online: May. 14, 2010

    The Author Email:

    DOI:10.3788/COL201008s1.0044

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