Chinese Journal of Lasers, Volume. 46, Issue 4, 0403001(2019)

Propagation of Laser-Induced Particles From Fused Silica

Ge Peng*, Lihua Lu, and Zhe Dong
Author Affiliations
  • Center for Precision Engineering, School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, Heilongjiang 150001, China
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    Figures & Tables(5)
    Measurement of spatial distribution of particles. (a) Schematic of laser path and sampling; (b) CCD imaging result after binarization; (c) optical microscopic imaging result
    Arrangement of particle counters on neutral surface
    Relative proportion of contaminants
    Cloud charts of particles number in neutral surface. (a) Particles with diameter of 0.3 μm; (b) particles with diameter of 10.0 μm
    Relationship between number of pollutant particles with different diameters and longitudinal distances
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    Ge Peng, Lihua Lu, Zhe Dong. Propagation of Laser-Induced Particles From Fused Silica[J]. Chinese Journal of Lasers, 2019, 46(4): 0403001

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    Paper Information

    Category: materials and thin films

    Received: Oct. 23, 2018

    Accepted: Dec. 26, 2018

    Published Online: May. 9, 2019

    The Author Email:

    DOI:10.3788/CJL201946.0403001

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