The propagation law of laser-induced particles in three-dimensional space is studied. The interaction of single pulse laser with fused silica can produce particles with diameter form 0.3 μm to 10.0 μm when the spot area is 0.8 mm 2, laser splitting ratio is 25.4 and average energy is 8 mJ. Most of these particles are sprayed along the neutral surface with a large scattering angle, while their concentrations are lessened from top to bottom. The proportion of particle sediments located at substrate is monotonically decreasing along the longitudinal (reverse direction of incident light) and horizontal (vertical to direction of incident light) direction except for a local growth occurring at 120 mm and 360 mm in longitudinal direction. The distances of movement of particles are inversely proportional to their diameters, and the particles with diameter of 0.3 μm can achieve the distance no more than 622 mm.