[1] [1] OLCUM S,YALCIN-YAMANER F,BOZKURT A,et al.Deep-collapse operation of capacitive micromachined ultrasonic transducers［J］.IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2011,58(11):2475-2483.

[2] [2] CARONTI A,CALIANO G,CAROTENUTO R,et al.Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging［J］.Microelectronics Journal,2006,37(8):770-777.

[3] [3] CHEN Jingkuang,WANG Mengli,CHENG J C,et al.A photoacoustic imager with light illumination through an infrared-transparent silicon CMUT array［J］.IEEE Transactions on Ultrasonics Ferroelectrics & Frequency Control,2012,59(4):766-775.

[4] [4] WYGANT I O,ZHUANG Xuefeng,YEH D T,et al.Integration of 2D CMUT arrays with front-end electronics for volumetric ultrasound imaging［J］.IEEE Trans Ultrason Ferroelectr Freq Control,2008,55(2):327-342.

[5] [5] YEH D T,ORALKAN O,WYGANT I O,et al.High-resolution imaging with high-frequency 1-D linear CMUT arrays［C］//Rotterdam,Netherlands:IEEE Ultrasonics Symposium,2005 IEEE,2005,1:665-668.

[6] [6] PARK K K,LEE H J,YARALIOGLU G G,et al.Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen［J］.Applied Physics Letters,2007,91(9):094102.1-094102.3.

[7] [7] NAZEMI H,EMADI A.A new advanced analytical model for Bi-layer circular CMUT-based gas sensors［C］//Montreal,QC,Canada:2019 IEEE Sensors,IEEE,2019:1-4.

[8] [8] CRISTMAN P,ORALKAN O,ZHUANG Xuefeng,et al.A 2D CMUT hydrophone array:Characterization results［C］//Rome,Italy:2009 IEEE International Ultrasonics Symposium,IEEE,2009:992-995.

[9] [9] SHAHIRI-TABARESTANI M,GANJI B A,SABBAGHI-NADOOSHAN R.Design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm［C］//Penang,Malaysia:2012 International Conference on Biomedical Engineering (ICoBE),IEEE,2012:484-489.

[10] [10] SHIN K S,JANG C I,KIM M J,et al.Development of novel implantable intraocular pressure sensors to enhance the performance in in vivo tests［J］.Journal of Microelectromechanical Systems,2015,24(6):1896-1905.

[11] [11] SHIN M,KRAUSE J S,DEBITETTO P A,et al.Acoustic Doppler velocity measurement system using capacitive micromachined ultrasound transducer array technology［J］.Journal of the Acoustical Society of America,2013,134(2):1011-1020.

[12] [12] SAVOIA A,CALIANO G,IULAT A,et al.Design and fabrication of a cMUT probe for ultrasound imaging of fingerprints［C］//San Diego,CA,USA:2010 IEEE International Ultrasonics Symposium,IEEE,2010:1877-1880.

[13] [13] KWAK Y S,CHOI W Y,PARK K K.Fingerprint imaging using CMUT impediography with glass waveguide［C］//Washington,DC,USA:2017 IEEE International Ultrasonics Symposium (IUS),IEEE,2017:1-4.

[14] [14] YOU W,CRETU E,ROHLING R.Analytical modeling of CMUTs in coupled electro-mechano-acoustic domains using plate vibration theory［J］.IEEE Sensors Journal,2011,11(9):2159-2168.

[15] [15] WANG Jiujiang,XIN Liu,YU Yuanyu,et al.A review on analytical modeling for collapse mode capacitive micromachined ultrasonic transducer of the collapse voltage and the static membrane deflections［J］.Micromachines,2021,12(6):714-727.

[16] [16] YAAR A R,YLDZ F,EROUL O.Capacitive micromachined ultrasonic transducer:transmission performance evaluation under different driving parameters and membrane stress for underwater imaging applications［J］.Microsystem Technologies,2020,26(12):3601-3611.

[17] [17] WANG Jiujiang,YU Yuanyu,PUN S H,et al.An accurate design to calculate and measure the capacitance of CMUT for pressure sensors［C］//Guangzhou,China:2016 IEEE International Conference on Consumer Electronics-China (ICCE-China),IEEE,2016:1-4.