Acta Optica Sinica, Volume. 34, Issue s1, 112011(2014)
Key Techniques in Large-Aperture Phase-Shifting Interferometer Via PZT
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Wu Xuhua, Chen Lei. Key Techniques in Large-Aperture Phase-Shifting Interferometer Via PZT[J]. Acta Optica Sinica, 2014, 34(s1): 112011
Category: Instrumentation, Measurement and Metrology
Received: Dec. 1, 2013
Accepted: --
Published Online: Aug. 12, 2014
The Author Email: Wu Xuhua (wuxh1978@aliyun.com)