Fig. 1. System overall structure diagram

Fig. 2. MEMS scanning spot array with varying diameters. (a) Spot diameter of 3 mm; (b) Spot diameter of 5 mm

Fig. 3. Variation of light spot diameter with different focal lengths

Fig. 4. Angular distribution of MEMS light spot deviations

Fig. 5. MEMS deflection angle and echo power correlation

Fig. 6. Optical antenna structure for reception

Fig. 7. Surface track image of the detector

Fig. 8. Geometric ring entrance energy map

Fig. 9. Distribution of relative illuminance in different fields of view

Fig. 10. Wide angle echo reception circuit

Fig. 11. Design of TDC7200 time measurement

Fig. 12. TDC7200 internal working mechanism

Fig. 13. TDC time measurement process flowchart

Fig. 14. Histogram of actual measurement with 150 ns

Fig. 15. Measurement error of TDC in actual conditions

Fig. 16. Receiving physical devices

Fig. 17. Time distribution of testing at a distance of 6 m

Fig. 18. Actual indoor scene testing

Fig. 19. 100 kHz echo waveform