Chinese Journal of Lasers, Volume. 27, Issue 6, 510(2000)

Design and Fabrication of 128×128 Diffractive Microlens Arrays on Si Substrates

[in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    References(5)

    [1] [1] Madeleine B. Fleming, M. C. Hutley. Blazed diffractive optics. Appl. Opt., 1997, 36(20):4635~4643

    [2] [2] X.-J. Yi, X.-Y. Zhang, Y. Li et al.. Microlens arrays formed by melting photoresist and ion beam milling. SPIE, 1997, 3276:249~253

    [4] [4] Li Yi, Yi Xinjian, Hao Jianhua. Design and fabrication of 128×128 diffractive microlens arrays. SPIE, 1998, 3505:19~24

    [5] [5] M. Edward Motamedi, Ming. C. Wu, Kristofer S. J. Pister. Micro-opto-electro-mechanical devices and on-chip optical processing. Opt. Eng., 1997, 36(5):1282~1297

    [6] [6] M. Edward Motamedi, William E. Tenannt, Haluk O. Sankur et al.. Micro-optic integration with focal plane arrays. Opt. Eng., 1997, 36(5):1374~1381

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and Fabrication of 128×128 Diffractive Microlens Arrays on Si Substrates[J]. Chinese Journal of Lasers, 2000, 27(6): 510

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    Paper Information

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    Received: Nov. 23, 1998

    Accepted: --

    Published Online: Aug. 9, 2006

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