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APPLIED LASER, Volume. 45, Issue 2, 168(2025)

Design and Accuracy Evaluation of an Arrayed Micro-Cantilever Sensing System

Zhu Jingxue1, Meng Qing1, Guo Zhiquan1,2, Zhao Jingnan1,2、*, and Yang Yuan3
Author Affiliations
  • 1Tianjin University of Science and Technology, Tianjin 300222, China
  • 2Tianjin Key Laboratory of Integrated Design and On-line Monitoring for Light Industry & Food Machinery and Equipment, Tianjin 300222, China
  • 3China Special Equipment Inspection And Research Institute, Beijing 100026, China
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    Zhu Jingxue, Meng Qing, Guo Zhiquan, Zhao Jingnan, Yang Yuan. Design and Accuracy Evaluation of an Arrayed Micro-Cantilever Sensing System[J]. APPLIED LASER, 2025, 45(2): 168

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    Paper Information

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    Received: Jun. 15, 2023

    Accepted: Jun. 17, 2025

    Published Online: Jun. 17, 2025

    The Author Email: Zhao Jingnan (jingnanzhao@tust.edu.cn)

    DOI:10.14128/j.cnki.al.20254502.168

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology