APPLIED LASER, Volume. 45, Issue 2, 168(2025)

Design and Accuracy Evaluation of an Arrayed Micro-Cantilever Sensing System

Zhu Jingxue1, Meng Qing1, Guo Zhiquan1,2, Zhao Jingnan1,2、*, and Yang Yuan3
Author Affiliations
  • 1Tianjin University of Science and Technology, Tianjin 300222, China
  • 2Tianjin Key Laboratory of Integrated Design and On-line Monitoring for Light Industry & Food Machinery and Equipment, Tianjin 300222, China
  • 3China Special Equipment Inspection And Research Institute, Beijing 100026, China
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    In order to detect bio-molecules, an arrayed micro-cantilever sensing system was designed. The system utilizes the optical lever principle and silicon-based micro-cantilevers to detect bio-molecules. This study integrates a temperature control system with a reaction chamber, achieving system integration, and utilizes a micro-moving platform to move the light spot between the arrayed micro-cantilevers. After constructing the detection platform, the system was calibrated, and its stability and accuracy were evaluated. Experimental results demonstrate that the actual resolution of the sensor can reach 0.03 μm, and the accuracy of the entire sensing system, measured using the thermal effect of bimetallic micro-cantilevers, is 96.1%. The achieved resolution and accuracy of the entire sensing system have been confirmed to meet the intended objectives through the utilization of bimetallic micro-cantilevers′ thermal effect.

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    Zhu Jingxue, Meng Qing, Guo Zhiquan, Zhao Jingnan, Yang Yuan. Design and Accuracy Evaluation of an Arrayed Micro-Cantilever Sensing System[J]. APPLIED LASER, 2025, 45(2): 168

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    Paper Information

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    Received: Jun. 15, 2023

    Accepted: Jun. 17, 2025

    Published Online: Jun. 17, 2025

    The Author Email: Zhao Jingnan (jingnanzhao@tust.edu.cn)

    DOI:10.14128/j.cnki.al.20254502.168

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