APPLIED LASER, Volume. 45, Issue 2, 168(2025)
Design and Accuracy Evaluation of an Arrayed Micro-Cantilever Sensing System
In order to detect bio-molecules, an arrayed micro-cantilever sensing system was designed. The system utilizes the optical lever principle and silicon-based micro-cantilevers to detect bio-molecules. This study integrates a temperature control system with a reaction chamber, achieving system integration, and utilizes a micro-moving platform to move the light spot between the arrayed micro-cantilevers. After constructing the detection platform, the system was calibrated, and its stability and accuracy were evaluated. Experimental results demonstrate that the actual resolution of the sensor can reach 0.03 μm, and the accuracy of the entire sensing system, measured using the thermal effect of bimetallic micro-cantilevers, is 96.1%. The achieved resolution and accuracy of the entire sensing system have been confirmed to meet the intended objectives through the utilization of bimetallic micro-cantilevers′ thermal effect.
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Zhu Jingxue, Meng Qing, Guo Zhiquan, Zhao Jingnan, Yang Yuan. Design and Accuracy Evaluation of an Arrayed Micro-Cantilever Sensing System[J]. APPLIED LASER, 2025, 45(2): 168
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Received: Jun. 15, 2023
Accepted: Jun. 17, 2025
Published Online: Jun. 17, 2025
The Author Email: Zhao Jingnan (jingnanzhao@tust.edu.cn)