Blade Edge's Penumbra Measurement for Scanning Slit of Lithographic Tools

Zhifan Liu; Ming Chen; Yang Bu; Jinghao Xu; Lili Fan; Jianhua Zhang; Xiangzhao Wang

doi:10.3788/CJL201946.1004005

Chinese Journal of Lasers, Volume. 46, Issue 10, 1004005(2019)

Blade Edge's Penumbra Measurement for Scanning Slit of Lithographic Tools

Zhifan Liu¹, Ming Chen², Yang Bu^2、*, Jinghao Xu², Lili Fan², Jianhua Zhang¹, and Xiangzhao Wang²

Author Affiliations

¹School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200444, China

²Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences, Shanghai 201800, China

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Zhifan Liu, Ming Chen, Yang Bu, Jinghao Xu, Lili Fan, Jianhua Zhang, Xiangzhao Wang. Blade Edge's Penumbra Measurement for Scanning Slit of Lithographic Tools[J]. Chinese Journal of Lasers, 2019, 46(10): 1004005

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Paper Information

Category: measurement and metrology

Received: Mar. 21, 2019

Accepted: Jun. 21, 2019

Published Online: Oct. 25, 2019

The Author Email: Bu Yang (buyang@siom.ac.cn)

DOI:10.3788/CJL201946.1004005

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology