[1] Liang S J, Tang W L, Jiao X et al. Effect of modified polishing agent on polishing quality of optical glass[J]. Chinese Journal of Lasers, 44, 1203001(2017).

[2] Zhao D W, Lu X C. Chemical mechanical polishing: theory and experiment[J]. Friction, 1, 306-326(2013).

[3] Mao C, Xiao B, Wang C Y et al. Removal uniformity in ring-pendulum double-sided polishing based on pressure distribution[J]. Acta Optica Sinica, 44, 1622001(2024).

[4] Enomoto T, Satake U, Miyake T et al. A newly developed polishing pad for achieving high surface flatness without edge roll off[J]. CIRP Annals, 60, 371-374(2011).

[5] Lei H, Luo J B, Ma J J. Advances and problems on chemical mechanical polishing[J]. Lubrication Engineering, 27, 73-76(2002).

[6] Xu J, Luo J B, Lu X C et al. Progress in material removal mechanisms of surface polishing with ultra precision[J]. Chinese Science Bulletin, 49, 1687-1693(2004).

[7] Li Y. Design of an optoelectronic level and its application for flatness error measurement[D](2019).

[8] Ge G Y, Li S Y, Wu M G. New on-line measuring method for large and ultraprecise flatness[J]. Machinery Manufacturing Engineer, 19-21, 1(1998).

[9] Hocken R J, Pereira P H[M]. Coordinate measuring machines and systems(2012).

[10] Fang B, Zou K, Meng J et al. A new measuring method for flatness of large plane[J]. Machine Tool & Hydraulics, 40, 22-24(2012).

[11] Gao W, Huang P S, Yamada T et al. A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers[J]. Precision Engineering, 26, 396-404(2002).

[12] Lu Y H, Zhou J W, Zhang W et al. The method study based on plane measurements of coordinate measuring machines[J]. Equipment Manufacturing Technology, 110-113(2011).

[13] Chen J B, Song D Z, Zhu R H et al. Large-aperture high-accuracy phase-shifting digital flat interferometer[J]. Optical Engineering, 35, 1936-1942(1996).

[14] Dai X L, Cao X D, Yang W Z et al. Flatness measurement of large annular planes based on three-point method[J]. Opto-Electronic Engineering, 37, 52-55, 62(2010).

[15] Geckeler R D, Just A. Distance-dependent influences on angle metrology with autocollimators in deflectometry[J]. Proceedings of SPIE, 7077, 70770B(2008).

[16] Bruning J H, Herriott D R, Gallagher J E et al. Digital wavefront measuring interferometer for testing optical surfaces and lenses[J]. Applied Optics, 13, 2693-2703(1974).

[17] Zhu R H, Chen L, Wang Q et al. Phase-shift interferometry and its application[J]. Journal of Applied Optics, 27, 85-88(2006).

[18] North-Morris M B, Millerd J E, Brock N J et al. Phase-shifting multiwavelength dynamic interferometer[J]. Proceedings of SPIE, 5531, 64-75(2004).

[19] Zhou X, Wang S M, Xu S C et al. Broadband optical interferometer for topography measurement with large field-of-view[J]. Chinese Journal of Lasers, 50, 1804001(2023).

[20] Cheng J L. Research on the technology for the high precision testing of three-dimensional shape with steps by dual-wavelength phase-shift interferometry[D](2018).

[21] Liu R C, Guo J, Li Y B. Investigation into the co-phase detection methodology for segmented plane mirrors utilizing grazing incidence interferometry[J]. Sensors, 24, 904(2024).

[22] Zhang L W, Chen H B, Sun W Q et al. Review of anti-vibration technology in phase-shifting interferometry[J]. Laser & Optoelectronics Progress, 60, 1900005(2023).

[23] Vannoni M, Freijo Martìn I. Surface measurements in “grazing incidence” interferometry for long X-ray mirrors: theoretical limits and practical implementations[J]. Proceedings of SPIE, 9962, 996207(2016).

[24] Evans C J. PVr: a robust amplitude parameter for optical surface specification[J]. Optical Engineering, 48, 043605(2009).

[25] Evans C J. Uncertainty evaluation for measurements of peak-to-valley surface form errors[J]. CIRP Annals, 57, 509-512(2008).

[26] Xu D Y, Wang Q, Gao Z S et al[M]. Current optical component testing and international standards(2009).