Laser & Optoelectronics Progress, Volume. 60, Issue 19, 1900002(2023)

Review of Developments in Semiconductor Laser Beam Combining Technology

Yun Fu1,2、*, Hao Tan1,2, Linhui Guo1,2, Lanping Zhang1,2, Quanwei Jiang1,2, Songxin Gao1,2, and Chun Tang1,2
Author Affiliations
  • 1Institute of Applied Electronics, Chinese Academy of Engineering Physics, Mianyang 621900, Sichuan , China
  • 2Key Laboratory of High Energy Laser Science and Technology, Chinese Academy of Engineering Physics, Mianyang 621900, Sichuan , China
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    Figures & Tables(19)
    Diagram of typical optical spectrum of output from spectral beam combining (SBC)
    Two key parts of dense SBC
    System structure diagram of SBC with closed loop
    Schematic diagram of SBC system with hybrid of wavelength-lock and superposition[9]
    Characteristics of SBC system with 11 laser diodes. (a) Output spectrum; (b) curve of output power versus input current[12]
    System structure diagram of SBC with diverse of wavelength-lock and superposition
    Diagram of SBC system based on wavelength-lock with TFF and superposition with optical gratings[42]
    Output characteristics of SBC with open loop using TFF[45]. (a) Output power versus input current; (b) light spot distribution
    Two ways of CBC phase-lock [47]. (a) Active phase control; (b) phase-lock with external cavity
    Ways of CBC superposition[47]. (a) Use of beam splitter; (b) use of phase grating
    Construction ways of external cavity[47]. (a) Binary tree; (b) cascaded; (c) DOE
    CBC with conical amplification chip[54]. (a) System structure diagram; (b) power distributions of different diffraction orders
    System structure of active phase control CBC based on MOPA technology with 900 laser diodes[58]
    System structure of active phase control CBC based on conical amplification chip and MOPA technology with 4 laser diodes[59]
    MOPA quasi-continuous CBC based on conical amplification chip[64]. (a) System structure; (b) output characteristics
    • Table 1. Recent developments of SBC technology with closed loop

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      Table 1. Recent developments of SBC technology with closed loop

      YearInstitutionNumber of combining routesOutput power /WBeam quality M2Reference
      2000MIT411~2013
      2004Aculight200271.514
      2006MIT100351.3515
      2008MIT25201016
      2008Coherent49100~1617
      2009BUT1920.13218
      2009DUST1296.419
      2009Coherent5014632.510
      2010Fraunhofer828(pulse peak power)220
      2010DUST129.35.321
      2012Alfalight1920076.222
      2012TeraDiode-20303.7523
      2013CIOMP1950.810.924
      2013CIOMP56140.614.1425
      2013DUST23.91.326
      2014BUT1358.81.627
      2015CAEP2712711.528
      2017CAEP27579.218.429
      2017CAEP94412.230
      2018CAEP1627107.331
      2018TRUMPF-40005032
      2020CIOMP19363.516.3733
      2021Sichuan University1235016.234
      2021Sichuan University1260032.435
    • Table 2. Recent developments of SBC technology with open loop

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      Table 2. Recent developments of SBC technology with open loop

      Wavelength-lock deviceYearInstitutionOutput power /WNumber of combining routesBeam quality M2Reference
      Chirp VBG2006MIT89.532641
      2008BUT11.249642
      2009Coherent Inc.1305032.510
      Diffraction grating2006University of Potsdam10251343
      201014251244
      TFF2017TRUMPF11002301945
    • Table 3. Recent developments of external cavity CBC technology

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      Table 3. Recent developments of external cavity CBC technology

      YearInstitutionNumber of routesPower /WLine width /pmPhase-lock technologyKey deviceCBC modeReference
      2008CNRS91.7100Talbot cavityTilt VBGFar-field48
      2009MIT117SCOWL arrayFar-field49
      2010ORNL4712.870V type cavityFar-field50
      2010CNRS100.365External phase adjustment+phase gratingNear-field51
      2013ORNL104.5~0.016V type cavityFar-field52
      2015CNRS25.9Narrow band filter gratingMOPA chipsNear-field53
      2017CNRS57.5External cavity with phase gratingsMOPA chips+DOENear-field54
      2018ORNL104.8100Talbot cavityIntegrated board area LDFar-field55
    • Table 4. Recent developments of active phase control CBC technology

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      Table 4. Recent developments of active phase control CBC technology

      YearInstitutionNumber of routesPower /WCombing efficiency /%Key technology/deviceReference
      1995Mcdonnell9005.515.2Phase adjustment on chips58
      1995SDL Inc4591.4MOPA chips59
      2009MIT21838.572SCOWL array49
      2012MIT211.281SPDG algorithm+phase locking with DOE gratings60
      2012MIT474087SPDG algorithm+beam combination with DOE gratings46
      2017CNRS511.376DOE54
      2019CNRS312.965Phase adjustment on MOPA chips61
      2019CNRS21370Phase stabilization62
      2019CNRS49.766MOPA chips+phase adjustment with PZT63
      2019CNRS422.764Quasi-continuous output64
      2019Russian Academy of Sciences201-Zigzag structures65
      2020CIOMP46.972Near-field combination+polarization combination66
      2021FBH417>80Special MOPA chips67
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    Yun Fu, Hao Tan, Linhui Guo, Lanping Zhang, Quanwei Jiang, Songxin Gao, Chun Tang. Review of Developments in Semiconductor Laser Beam Combining Technology[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1900002

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    Paper Information

    Category: Reviews

    Received: Mar. 30, 2022

    Accepted: Jun. 13, 2022

    Published Online: Sep. 20, 2023

    The Author Email: Yun Fu (fy7133991@126.com)

    DOI:10.3788/LOP221150

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