Laser & Optoelectronics Progress, Volume. 60, Issue 17, 1700005(2023)

Fabrication of Micro/Nano Structures on Metal Surfaces by Femtosecond Laser and Its Technical Applications

Suocheng Wang, Shiyun Dong*, Shixing Yan, and Xiaoting Liu
Author Affiliations
  • National Key Laboratory for Remanufacturing, Army Academy of Armored Forces, Beijing 100072, China
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    Figures & Tables(24)
    General process of femtosecond laser interact with metal[21]
    Optical absorption properties test of micro/nano flower structures constructed on copper surface[31]. (a) Reflectance of bare copper, commercial copper, and copper covered with micro/nano hierarchical structures in the 200-2000 nm wavelength band; (b) reflectance test of commercial copper and copper covered with micro/nano hierarchical structures as the incident angle changes in the 200-800 nm wavelength band
    Photothermal conversion performance of micro/nano flower structures constructed on copper[31]. (a) Schematic diagram of photothermal conversion test of copper sheet with micro/nano flower structures; (b) average absorbances of different samples
    Process flow chart of fabricating high-efficiency anti-reflection surfaces on metal surfaces by femtosecond laser pulse implantation[32]
    When the femtosecond laser wavelength was 400 nm, and the polarization direction was parallel to the scanning direction, the surface periodic structure was prepared on the tungsten surface[37]. (a) SEM image of the periodic structure induced by laser; (b) enlarged view of the center position of Fig.(a)
    When the femtosecond laser wavelength was 800 nm, and the polarization direction was parallel to the scanning direction, the surface periodic structure was prepared on the tungsten surface[37]. (a) SEM image of the periodic structure induced by laser; (b) enlarged view of the center position of Fig.(a)
    Preparation of copper hydroxide and copper oxide urchin like micro/nano structures with wide band antireflection properties on copper surface by femtosecond laser composite chemical oxidation[39]. (a) (b) SEM images of the urchin-like arrays; (c) (d) SEM images of nanowires and nanoflowers; (e) (f) SEM images of the nanoflowers fabricated by chemical oxidation alone
    Surface structure and wettability of lotus leaf[43]. (a) Appearance of lotus leaf; (b) infiltration of lotus leaf surface; (c) (d) SEM images of lotus leaf
    Preparation of superhydrophilic and underwater superoleophobic microporous structures on titanium foil surface by femtosecond laser[50]. (a)-(d) SEM images of microporous; (e)-(h) oil-water separation experiment of titanium foil contains microporous structures
    Preparation of microporous arrays on the surface of copper foil by femtosecond laser spatial light shaping[51]. (a) Optical image of copper sheet with microporous, the left one contains microporous and the right one was pristine copper sheet; (b) microscope picture of microporous; (c)(d) SEM images of microporous on copper sheet
    Experiment of oil-water separation with microporous structure prepared by femtosecond laser spatial light shaping[51]. (a) Oil-water mixture and separation device; (b)(c) oil-water separation process diagram
    Morphology of the titanium sheet processed by the combination of femtosecond laser combined chemical oxidation[53]. (a) Three-dimensional image of the micro/nano structures; (b) (c) SEM images of the micro/nano structures
    Preparation of TiO2 micro/nano structures by femtosecond laser combined chemical oxidation and research its photocatalytic performances[53]. (a) Test of light reflection performances of titanium sheet covered with various TiO2 micro/nano structures; (b) spectral absorption test of organic dyes after TiO2 degradation; (c) photodegradation rate test of TiO2 prepared by composite method and chemical oxidation alone; (d) cyclic performance test of photodegradation of TiO2
    Preparation of TiO2 nanotubes by femtosecond laser processing combined chemical oxidation[54]. (a) Original titanium sheet; (b) (c) preparation of TiO2 nanotubes by anodization alone; (d) microstructure arrays fabricated by femtosecond laser; (e) hierarchical TiO2 nanotubes; (f) amorphous layer on the surface of titanium sheet after femtosecond laser processing; (g) (h) schematic diagram of hierarchical structures
    Application of femtosecond laser processing metal materials in aerospace. (a) Micro-holes of engine fuel injector fabricated by femtosecond laser[55]; (b) air film holes array of turbine blade fabricated by femtosecond laser[56]; (c) heat sink fabricated on metal surface by femtosecond laser[57]
    Preparation of micro/nano structures on titanium alloy by femtosecond laser processing and test its anti-icing performance[63]. (a1)-(a4) Freezing process of droplets when the scanning speed was 600 mm/s; (b1)-(b4) freezing process of droplets when the scanning speed was 2000 mm/s; (c1)-(c4) freezing process of droplets when the scanning speed was 5000 mm/s
    Femtosecond laser fabricates micro/nano structures with different morphologies on copper surface and tests its anti-icing[64]. (a) (b) SEM images of copper surface morphologies when the laser scanning speed was 20 mm/s; (c) (d) SEM images of copper surface morphologies when the laser scanning speed was 60 mm/s; (e) (f) SEM images of copper surface morphologies when the laser scanning speed was 100 mm/s; (g) freezing delay test of copper sheets at low temperatures
    Principle of making corneal flap with femtosecond laser[66]
    Preparation of micro/nano structures of zirconium-based materials by femtosecond laser processing[71]. (a) SEM image of the materials processed by femtosecond laser; (b) (c) magnification images of material surface
    Preparation of anticoagulant and antibacterial micro/nano structures on nitinol alloy by temporally shaped femtosecond laser[72]. (a) Single-pulse laser shaping into double-pulse; (b) preparation of porous structures; (c) anticoagulant and antibacterial performance test of porous structure; (d) anticoagulant and antibacterial performance test of nitinol alloy bare sheet
    • Table 1. Femtosecond laser preparation of micro/nano structures with different morphologies on common metal materials

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      Table 1. Femtosecond laser preparation of micro/nano structures with different morphologies on common metal materials

      MaterialStructureCentral wavelength /nmPulse duration /fsRepetition rate /kHzMethod
      CopperMicron conical structure with nanoparticles1030800400Femtosecond laser direct writing22
      Stainless steelColumnar structure arrays800501Femtosecond laser direct writing23
      TitaniumRipples800501Femtosecond laser induced surface Periodic structure24
      TungstenRipples800501Femtosecond laser induced surface periodic structure25
      AluminiumHierarchical micro/nano conical structure arrays1030800200Femtosecond laser combined chemical oxidation26
    • Table 2. Application of femtosecond laser fabrication of metal surface micro/nano structures in environmental engineering

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      Table 2. Application of femtosecond laser fabrication of metal surface micro/nano structures in environmental engineering

      MaterialStructureFunction application
      CopperGroove and ripple composite structuresEfficient oil-water separation and surface self-cleaning44
      AluminiumMicropores with micro/nano structuresUnderwater superoleophobic surface with low adhesion for oil-water separation45
      Stainless steelRipples and periodic cone-shaped spikesSuperhydrophobic surfaces46
      TitaniumHierarchical micro/nano conical structure arraysImprove the efficiency of photocatalytic degradation of organic dyes47
    • Table 3. Application of femtosecond laser fabrication of metal surface micro/nano structures in aerospace

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      Table 3. Application of femtosecond laser fabrication of metal surface micro/nano structures in aerospace

      MaterialStructureFunction application
      CopperThree-dimensional micro/nano conical structure arraysDelayed icing of material surfaces26
      Aluminum alloyMicro/nano square structure arraysSurface self-cleaning and anti-icing58
      Stainless steelThree-dimensional columnar structures with ripplesRegulate the freezing time of droplets to achieve surface anti-icing59
      Titanium alloyThree-dimensional groove and stripe composite structure arraysRegulate droplet freezing time and inhibit surface frosting60
    • Table 4. Application of femtosecond laser fabrication of metal surface micro/nano structures in biomedicine

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      Table 4. Application of femtosecond laser fabrication of metal surface micro/nano structures in biomedicine

      MaterialSurface structureFunctional application
      Magnesium alloyRipples,micropores with ripples,and irregular grooves with particlesAs a medical implant,it can promote cell proliferation and differentiation67
      Stainless steelRipple and conical structuresGood blood compatibility65
      Titanium alloyNanoparticles,ripple,and microgrooveGlucose detection68
      TitaniumNanoripplesAntibacterial69
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    Suocheng Wang, Shiyun Dong, Shixing Yan, Xiaoting Liu. Fabrication of Micro/Nano Structures on Metal Surfaces by Femtosecond Laser and Its Technical Applications[J]. Laser & Optoelectronics Progress, 2023, 60(17): 1700005

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    Paper Information

    Category: Reviews

    Received: Aug. 2, 2022

    Accepted: Sep. 26, 2022

    Published Online: Sep. 1, 2023

    The Author Email: Shiyun Dong (syd422@vip.sohu.com)

    DOI:10.3788/LOP222196

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