Acta Optica Sinica, Volume. 35, Issue 8, 813001(2015)

Silicon Photonic Crystal Nanobeam Cavities Fabricated by Deep-Etching Method

Yu Ping1、*, Qiu Huiye2, Wu Feiqing1, Wang Zhuoyuan1, Yu Mingyan1, and Yu Enjun1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(12)

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    [4] [4] Joannopoulos J D, Johnson S G, Winn J N, et al.. Photonic Crystals: Molding the Flow of Light[M]. New Jersey: Princeton University Press, 2008: 1-10.

    [5] [5] Yu P, Qiu C, Hu T, et al.. High-Q Photonic crystal cavity in a single-mode silicon ridge waveguide[J]. Chin Phys Lett, 2013, 30(10): 104204.

    [6] [6] Yu P, Qi B, Xu C, et al.. An improved surface-plasmonic nanobeam cavity for higher Q and smaller V[J]. Chinese Sci Bull, 2012, 57(25): 3371-3374.

    [7] [7] Yu P, Qi B A, Jiang X Q, et al.. Ultrasmall- V high-Q photonic crystal nanobeam microcavities based on slot and hollow-core waveguides[J]. Opt Lett, 2011, 36(8): 1314-1316.

    [8] [8] Yu P, Hu T, Qiu H Y, et al.. Fano resonances in ultracompact waveguide Fabry-Perot resonator side-coupled lossy nanobeam cavities[J]. Appl Phys Lett, 2013, 103(9): 091104.

    [9] [9] Yu P, Hu T, Qiu C, et al.. Ultracompact, reflection-free and high-efficiency channel drop filters based on photonic crystal nanobeam cavities[J]. Chin Phys Lett, 2013, 30(3): 034210.

    [10] [10] Quan Q M, Deotare P B, Loncar M. Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide[J]. Appl Phys Lett, 2010, 96(20): 203102.

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    CLP Journals

    [1] Wang Ting, Liang Binming, Jiang Qiang, Cao Heng, Gao Lun. Anti-Reflection Characteristics of Photonic Crystals[J]. Laser & Optoelectronics Progress, 2016, 53(4): 41602

    [2] Han Xiaonan, Han Xiuyou, Shao Yuchen, Lu Zhili, Teng Jie, Wu Zhenlin, Wang Jinyan, Zhao Mingshan. Study on Polymer Microring Optical Biosensor Based on Slot Waveguide[J]. Acta Optica Sinica, 2016, 36(4): 413001

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    Yu Ping, Qiu Huiye, Wu Feiqing, Wang Zhuoyuan, Yu Mingyan, Yu Enjun. Silicon Photonic Crystal Nanobeam Cavities Fabricated by Deep-Etching Method[J]. Acta Optica Sinica, 2015, 35(8): 813001

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    Paper Information

    Category: Integrated Optics

    Received: Jan. 27, 2015

    Accepted: --

    Published Online: Aug. 10, 2015

    The Author Email: Ping Yu (yuping@nit.zju.edu.cn)

    DOI:10.3788/aos201535.0813001

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