Acta Optica Sinica, Volume. 35, Issue 8, 813001(2015)
Silicon Photonic Crystal Nanobeam Cavities Fabricated by Deep-Etching Method
[1] [1] Vahala K J. Optical microcavities[J]. Nature, 2003, 424(6950): 839-846.
[2] [2] Reed G T, Knights A P. Silicon Photonics: An Introduction[M]. Chichester: John Wiley & Sons Ltd Press, 2004: 91-92.
[4] [4] Joannopoulos J D, Johnson S G, Winn J N, et al.. Photonic Crystals: Molding the Flow of Light[M]. New Jersey: Princeton University Press, 2008: 1-10.
[5] [5] Yu P, Qiu C, Hu T, et al.. High-Q Photonic crystal cavity in a single-mode silicon ridge waveguide[J]. Chin Phys Lett, 2013, 30(10): 104204.
[6] [6] Yu P, Qi B, Xu C, et al.. An improved surface-plasmonic nanobeam cavity for higher Q and smaller V[J]. Chinese Sci Bull, 2012, 57(25): 3371-3374.
[7] [7] Yu P, Qi B A, Jiang X Q, et al.. Ultrasmall- V high-Q photonic crystal nanobeam microcavities based on slot and hollow-core waveguides[J]. Opt Lett, 2011, 36(8): 1314-1316.
[8] [8] Yu P, Hu T, Qiu H Y, et al.. Fano resonances in ultracompact waveguide Fabry-Perot resonator side-coupled lossy nanobeam cavities[J]. Appl Phys Lett, 2013, 103(9): 091104.
[9] [9] Yu P, Hu T, Qiu C, et al.. Ultracompact, reflection-free and high-efficiency channel drop filters based on photonic crystal nanobeam cavities[J]. Chin Phys Lett, 2013, 30(3): 034210.
[10] [10] Quan Q M, Deotare P B, Loncar M. Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide[J]. Appl Phys Lett, 2010, 96(20): 203102.
[11] [11] Desiatov B, Goykhman I, Levy U. Parabolic tapered photonic crystal cavity in silicon[J]. Appl Phys Lett, 2012, 100(4): 041112.
[12] [12] Pernice W H P, Xiong C, Schuck C, et al.. High-Q aluminum nitride photonic crystal nanobeam cavities[J]. Appl Phys Lett, 2012, 100(9): 091105.
Get Citation
Copy Citation Text
Yu Ping, Qiu Huiye, Wu Feiqing, Wang Zhuoyuan, Yu Mingyan, Yu Enjun. Silicon Photonic Crystal Nanobeam Cavities Fabricated by Deep-Etching Method[J]. Acta Optica Sinica, 2015, 35(8): 813001
Category: Integrated Optics
Received: Jan. 27, 2015
Accepted: --
Published Online: Aug. 10, 2015
The Author Email: Ping Yu (yuping@nit.zju.edu.cn)