Fig. 1. Structure diagram of P on N type EQR SiPM. （a） Profile structure; （b） Planer structure

Fig. 2. Experimental setup diagram of PDE measurement

Fig. 3. Reverse I-V curve of EQR SiPM

Fig. 4. DCR and P_DiCT as a function of overvoltage

Fig. 5. Fix driving voltage and pulse width, photocurrent of PIN and SiPM as a function of LED driving frequency, with EQR15-LE @4 V as an example

Fig. 6. PDE as a function of overvoltage at 420 nm

Fig. 7. PDE as a function of wavelength

Fig. 8. Histogram of pulse area. (a) EQR15-LE @83%OV_max；(b) EQR06 series@80%OV_max

Fig. 9. Gain as a function of overvoltage