Optoelectronic Technology, Volume. 40, Issue 3, 195(2020)
Research on Technology to Enhance the Quantum Efficiency in Ultraviolet Spectral Range of CCD
Front-illuminated charge-coupled devices (CCD)based on silicon substrate always have a lower response in ultraviolet spectral range.Research of enhancing the quantum efficiency performance of the front-illuminated CCD in ultraviolet spectral range was presented. The better result of the transmission film in ultraviolet spectral range at photo sensitive surface, the reduction of interference by surface state at photo?sensitive area and the ultra thin-film hole-accumulation diode(HAD) have been achieved based on the optimization design of anti-reflecting film, the photo?sensitive structure of front-illuminated CCD, as well as the structure and process parameter optimization of HAD that were carried on during the research. The beneficial effect of the greater increase in quantum efficiency performance of the front-illuminated CCD in ultraviolet spectral range detect came from the optimization of anti-reflecting film, the photo sensitive area and the HAD structure,as well as promoting the interacting quantum efficiency of the CCD.The research result indicates that the linear CCD has reached an average quantum efficiency of 46.13% in the spectral range that covers 300 nm~400 nm, and the average quantum efficiency has increased from 8.6% to 47.48% in 340 nm~390 nm spectral range.
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Xiaodong WANG, Chaomin WANG, Zhihong FU, Jie WANG. Research on Technology to Enhance the Quantum Efficiency in Ultraviolet Spectral Range of CCD[J]. Optoelectronic Technology, 2020, 40(3): 195
Category: Research and Trial-manufacture
Received: Apr. 20, 2020
Accepted: --
Published Online: Jan. 13, 2021
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