Chinese Journal of Lasers, Volume. 44, Issue 1, 104002(2017)

Impact of Spatial Light Modulator Pixel Pitch on the Accuracy of Aspheric Testing

Ma Xiao1,2、*, Liu Shijie1, Zhang Zhigang1, and Shao Jianda1
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  • 1[in Chinese]
  • 2[in Chinese]
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    Figures & Tables(8)
    Aspheric surface testing optical path
    Simulation process
    SLM with different pixel pitches in simulation model. (a) 36 sampling points in one pixel; (b) 9 sampling points in one pixel
    Surface 1 in the simulation model
    Compensation wave-front error changes with pixel pitch. (a) PV changes with pixel pitch; (b) RMS changes with pixel pitch
    Schematic of compensation wave-front after divide
    Frequency distribution of compensation wave-front error when R=1500 mm. (a) PV changes with frequency; (b) RMS changes with frequency
    • Table 1. Characteristic frequency of different pixel pitches when R=1500 mm

      View table

      Table 1. Characteristic frequency of different pixel pitches when R=1500 mm

      w /μmfmax/mm-1fpv /mm-1frms /mm-1
      862.50##
      2420.83##
      4012.50##
      568.93##
      726.947.217.53
      885.685.745.85
      1044.815.115.43
      1204.174.485.11
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    Ma Xiao, Liu Shijie, Zhang Zhigang, Shao Jianda. Impact of Spatial Light Modulator Pixel Pitch on the Accuracy of Aspheric Testing[J]. Chinese Journal of Lasers, 2017, 44(1): 104002

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    Paper Information

    Category: measurement and metrology

    Received: Sep. 18, 2016

    Accepted: --

    Published Online: Jan. 10, 2017

    The Author Email: Ma Xiao (chujiangkuo@163.com)

    DOI:10.3788/CJL201744.0104002

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