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Laser & Optoelectronics Progress, Volume. 58, Issue 11, 1114001(2021)

Material Removal Rate of Nano-Diamond Coating Ablated by Femtosecond Laser

Yuan Han, Yuping Ma*, Haihang Wang, Xiaolong Wu, Chao Wei, and Yao Zhang
Author Affiliations
  • College of Mechanical and Electrical Engineering, Anhui Jianzhu University, Hefei , Anhui 230601, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (14)
    Equations (7)
    References (27)
    Cited By (4)
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    Figures & Tables(14)
    Diamond coating samples. (a) Cemented carbide sample after deposition of nano-crystalline diamond coating; (b) SEM image of coating surface

    Fig. 1. Diamond coating samples. (a) Cemented carbide sample after deposition of nano-crystalline diamond coating; (b) SEM image of coating surface

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    Schematic of femtosecond laser ablation of nano-crystalline diamond coating. (a) Schematic of femtosecond processing system; (b) schematic of laser scanning of nano-crystalline diamond coating

    Fig. 2. Schematic of femtosecond laser ablation of nano-crystalline diamond coating. (a) Schematic of femtosecond processing system; (b) schematic of laser scanning of nano-crystalline diamond coating

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    Schematic of spot overlapping rate

    Fig. 3. Schematic of spot overlapping rate

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    Cross-sectional coating morphologies under different repetition rates. （a）（e） 100 Hz； （b）（f） 500 Hz； （c）（g） 1 kHz；（d）（h） 10 kHz

    Fig. 4. Cross-sectional coating morphologies under different repetition rates. （a）（e） 100 Hz； （b）（f） 500 Hz； （c）（g） 1 kHz；（d）（h） 10 kHz

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    Material removal rates under different repetition rates

    Fig. 5. Material removal rates under different repetition rates

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    Cross-sectional coating ablation morphologies under different energy-flux densities of focusing spot. （a） 14.2 J/cm2； （b） 19.8 J/cm2； （c） 22.7 J/cm2； （d） 28.3 J/cm2； （e） 34.0 J/cm2； （f） 42.5 J/cm2

    Fig. 6. Cross-sectional coating ablation morphologies under different energy-flux densities of focusing spot. （a） 14.2 J/cm2； （b） 19.8 J/cm2； （c） 22.7 J/cm2； （d） 28.3 J/cm2； （e） 34.0 J/cm2； （f） 42.5 J/cm2

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    Material removal rates under different energy-flux densities

    Fig. 7. Material removal rates under different energy-flux densities

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    Cross-sectional coating ablation morphologies under different scanning speeds. （a）（i）0.1 mm/s； （b）（j） 0.3 mm/s； （c）（k） 0.5 mm/s；（d）（l） 1.0 mm/s； （e）（m） 1.3 mm/s； （f）（n） 1.5 mm/s； （g）（o） 1.7 mm/s； （h）（p） 2.0 mm/s

    Fig. 8. Cross-sectional coating ablation morphologies under different scanning speeds. （a）（i）0.1 mm/s； （b）（j） 0.3 mm/s； （c）（k） 0.5 mm/s；（d）（l） 1.0 mm/s； （e）（m） 1.3 mm/s； （f）（n） 1.5 mm/s； （g）（o） 1.7 mm/s； （h）（p） 2.0 mm/s

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    Material removal rates under different scanning speeds

    Fig. 9. Material removal rates under different scanning speeds

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    • Table 1. Ablation widths and depths under different repetition rates

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      Table 1. Ablation widths and depths under different repetition rates

      Repetition rate /HzEnergy flux density of 14.2 J/cm2Energy flux density of 56.6 J/cm2
      Width /μmDepth /μmWidth /μmDepth /μm
      100114.82.09120.32.81
      500113.72.10121.12.96
      103114.42.13119.03.01
      104113.52.25119.53.08

    • Table 2. Laser output powers under different energy-flux densities of focusing spot

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      Table 2. Laser output powers under different energy-flux densities of focusing spot

      Energy flux density /(J·cm-2)14.219.822.728.334.042.5
      Power /mW507080100120150

    • Table 3. Ablation widths and depths under different energy-flux densities of focusing spot

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      Table 3. Ablation widths and depths under different energy-flux densities of focusing spot

      Energy flux density /( J·cm-2)14.219.822.728.334.042.5
      Width /μm101.9104.9110.6114.1122.4128.2
      Depth /μm1.361.641.783.213.784.32

    • Table 4. Spot overlapping rates under different scanning speeds

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      Table 4. Spot overlapping rates under different scanning speeds

      Scanning speed /（mm·s-1）0.10.30.51.01.31.51.72.0
      Spot overlapping rate /%99.799.098.396.795.795.094.393.3

    • Table 5. Ablation widths and depths under different scanning speeds

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      Table 5. Ablation widths and depths under different scanning speeds

      Scanning speed /（ mm·s-1）Energy flux density of 14.2 J/cm2Energy flux density of 56.6 J/cm2
      Width /μmDepth /μmWidth /μmDepth /μm
      0.1116.69.80127.217.7
      0.3114.88.29128.615.46
      0.5115.25.03128.314.51
      1.0118.12.24126.310.03
      1.3118.01.53127.57.59
      1.5117.41.08125.95.93
      1.7115.90.95128.65.37
      2.0116.50.81128.44.68
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    Yuan Han, Yuping Ma, Haihang Wang, Xiaolong Wu, Chao Wei, Yao Zhang. Material Removal Rate of Nano-Diamond Coating Ablated by Femtosecond Laser[J]. Laser & Optoelectronics Progress, 2021, 58(11): 1114001

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Sep. 18, 2020

    Accepted: Nov. 5, 2020

    Published Online: Jun. 7, 2021

    The Author Email: Yuping Ma (jessymayp@ahjzu.edu.cn)

    DOI:10.3788/LOP202158.1114001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology