On-Line Displacement Measurement System Based on Multiplexed Optical Fiber Mach-Zenhder Heterodyne Interferometry

Wang Yunzhi; Xie Fang; Chen Longhui; Xu Haibo; Li Mingjia

doi:10.3788/CJL201946.0904007

Chinese Journal of Lasers, Volume. 46, Issue 9, 904007(2019)

On-Line Displacement Measurement System Based on Multiplexed Optical Fiber Mach-Zenhder Heterodyne Interferometry

Wang Yunzhi, Xie Fang^*, Chen Longhui, Xu Haibo, and Li Mingjia

Laboratory of Opto-Electronic Information Science and Engineering, Department of Physics, School of Science, Beijing Jiaotong University, Beijing 100044, China

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References(10)

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[2] Wang C, Xu L L, Zhu J et al. A novel integrated fiber-optic interferometer model and its application in micro-displacement measurement[J]. Optics and Lasers in Engineering, 86, 125-131(2016). http://www.sciencedirect.com/science/article/pii/S0143816616300914

[3] Guan K S, Li Y H, Chen Y Xet al. A novel optical fiber displacement measurement system[J]. Materials, 599/600/601, 684-688(2014).

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[5] Seat C, Ouisse E, Morteau E et al. Vibration displacement measurements based on a polarimetric extrinsic fibre Fabry Perot interferometer[J]. Measurement Science and Technology, 14, 710-716(2003). http://www.ingentaconnect.com/content/iop/mst/2003/00000014/00000006/art00302

[6] Meggitt B T, Hall C J, Weir K. An all fibre white light interferometric strain measurement system[J]. Sensors and Actuators A: Physical, 79, 1-7(2000). http://www.sciencedirect.com/science/article/pii/S0924424799000710

[7] Wang W H, Wu N, Tian Y et al. Miniature all-silica optical fiber pressure sensor with an ultrathin uniform diaphragm[J]. Optics Express, 18, 9006-9014(2010). http://europepmc.org/abstract/MED/20588746

[8] Ohta T, Koshimizu C, Kawasaki K et al. Simultaneous measurement of substrate temperature and thin-film thickness on SiO2/Si wafer using optical-fiber-type low-coherence interferometry[J]. Journal of Applied Physics, 105, 013110(2009). http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5131981

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Wang Yunzhi, Xie Fang, Chen Longhui, Xu Haibo, Li Mingjia. On-Line Displacement Measurement System Based on Multiplexed Optical Fiber Mach-Zenhder Heterodyne Interferometry[J]. Chinese Journal of Lasers, 2019, 46(9): 904007

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Paper Information

Category: Measurement and metrology

Received: Apr. 11, 2019

Accepted: --

Published Online: Sep. 10, 2019

The Author Email: Fang Xie (fxie@bjtu.edu.cn)

DOI:10.3788/CJL201946.0904007

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology