Chinese Optics, Volume. 18, Issue 3, 467(2025)
Variable coupling dynamic monitoring and compensation technology of optical film thickness
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Xin DU, Xiu-hua FU, Suo-tao DONG, Yong-gang PAN, You-de WANG, Hai-feng XIE. Variable coupling dynamic monitoring and compensation technology of optical film thickness[J]. Chinese Optics, 2025, 18(3): 467
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Received: Sep. 27, 2024
Accepted: --
Published Online: Jun. 16, 2025
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