Chinese Optics, Volume. 18, Issue 3, 467(2025)
Variable coupling dynamic monitoring and compensation technology of optical film thickness
To address issues related to the accurate control of infrared band film thickness and precise wavelength positioning, we employ the LabVIEW programming language to develop a dynamic monitoring and compensation technology for optical film thickness, based on an optical film thickness monitoring system. Based on the principles of light interference and optical thin film design, a mathematical model is constructed using the photoelectric polarimetric method. We focus on resolving stopping errors and filtering noise at extremum points, thereby accurately restoring the real-time monitoring data of light intensity. The system achieves real-time and synchronous fitting of the film’s transmittance curve, calculates and fits the stopping point corresponding to the extremum of the film thickness. To validate the reliability and stability of the optical control system, a
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Xin DU, Xiu-hua FU, Suo-tao DONG, Yong-gang PAN, You-de WANG, Hai-feng XIE. Variable coupling dynamic monitoring and compensation technology of optical film thickness[J]. Chinese Optics, 2025, 18(3): 467
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Received: Sep. 27, 2024
Accepted: --
Published Online: Jun. 16, 2025
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