Chinese Journal of Lasers, Volume. 43, Issue 11, 1104002(2016)
Research on High Accuracy Sub-Aperture Stitching Algorithm for Flat Optics
[1] [1] Kin C J, Wyant J C. Subaperture test of a large flat or a fast aspheric surface[J]. J Opt Soc Am, 1981, 71: 1587.
[2] [2] Thunen J G, Kwon O Y. Full aperture testing with subaperture test optics[C]. SPIE, 1983, 351: 19-27.
[3] [3] Chow W W, Lawrence G N. Method for subaperture testing interferogram reduction[J]. Optics Letters, 1983, 8(9): 468-470.
[4] [4] Stuhlinger T W. Subaperture optical testing: Experimental verification[C]. SPIE, 1986, 655: 350-359.
[5] [5] Otsubo M, Okada K, Tsujiuchi J. Measurement of large plane surface shapes by connecting small-aperture interferograms[J]. Optical Engineering, 1994, 33(2): 608-613.
[6] [6] Bray M. Stitching interferometer for large optics using a standard interferometer: Description of an automated system[C]. SPIE, 1997, 3047: 911-918.
[7] [7] Murphy P, Forbes G, Fleig J, et al. Stitching interferometry: A flexible solution for surface metrology[J]. Optics and Photonics News, 2003, 14(5): 38-43.
[8] [8] King C W. An automated metrology workstation for the measurement of large convex surfaces[C]. Optical Society of America, 2014: OTh3B. 2.
[9] [9] King C W, Bibby M. Development of ametrology workstation for full-aperture and sub-aperture stitching measurements[C]. Procedia CIRP, 2014, 13: 359-364.
[10] [10] Chen M, Cheng W, Wang C W W. Multiaperture overlap-scanning technique for large-aperture test[C]. SPIE, 1992, 1553: 626-635.
[11] [11] Wang Q, Chen J, Zhu R, et al. New technique for testing large optical flat[C]. SPIE, 1993, 2003: 389-397.
[12] [12] Bai Jian, Cheng Shangyi. Object function analysis for subaperture testing and connection[J]. Optical Instruments, 1997, 19(4): 36-39.
[13] [13] Zhang Rongzhu, Shi Qikai, Cai Bangwei, et al. Study on the experiments of the stitching interferometer[J]. Optical Technique, 2004, 30(2): 173-175.
[14] [14] Chen Yiwei, Wang Fei,Wang Gaowen, et al. New sub-aperture stitching algorithm based on transformation[J]. Acta Optica Sinica, 2013, 33(9): 0912004.
[15] [15] Wang Xiaokun. Testing large SiC mirror by subaperture stitching interferometry[J]. Laser & Optoelectronics Progress, 2013, 50(5): 051202.
[16] [16] Bray M. Stitching interferometry and absolute surface shape metrology: Similarities[C]. SPIE, 2001, 4451: 375-383.
[17] [17] Su P, Burge J H, Parks R E. Application of maximum likelihood reconstruction of subaperture data for measurement of large flat mirrors[J]. Applied Optics, 2010, 49(1): 21-31.
[18] [18] Miao Erlong, Su Dongqi, Peng Shijun. High precise absolute flat calibration[J]. Laser & Optoelectronics Progress, 2014, 51(5): 051203.
[19] [19] Li Yong, Tang Feng, Lu Yunjun, et al. A method for reducing the error accumulation in sub-aperture stitching interferometer for flat optics[J]. Chinese J Lasers, 2015, 42(7): 0708006.
Get Citation
Copy Citation Text
Zhu Penghui, Tang Feng, Lu Yunjun, Wang Xiangzhao, Guo Fudong, Li Yong. Research on High Accuracy Sub-Aperture Stitching Algorithm for Flat Optics[J]. Chinese Journal of Lasers, 2016, 43(11): 1104002
Category: measurement and metrology
Received: Apr. 11, 2016
Accepted: --
Published Online: Nov. 10, 2016
The Author Email: Penghui Zhu (leslie@siom.ac.cn)