OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 19, Issue 1, 33(2021)

Vibration Detection Method of Phase-Shifting Laser Interferometer Based on Interference Image Analysis

ZHAI Tian-bao*, ZHONG Ping, LI Zhi-song, SU Shu, and LI Niu-qi
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    References(6)

    [1] [1] Suriyasirikun S, Khlayboonme S T, Thowladda W. Phase-shifting interferometry for surface roughness measurement on glass substrates[J]. Advanced Materials Research, 2014, 979: 463-466.

    [2] [2] Zhuo Li, Xiaoxu Lu. An effective method in calibrating nonlinear errors for phase-shifting interferometry[J]. Optik-International Journal for Light and Electron Optics, 2014, 125(9): 2109-2112.

    [10] [10] Deck Leslie L. Model-based phase shifting interferometry[J]. Applied Optics, 2014, 53(21): 95-99.

    [17] [17] Li Y, Zhang Yi, Yang Y, et al. Accurate phase retrieval algorithm based on linear correlation in self-calibration phase-shifting interferometry with blind phase shifts[J]. Optics Communications, 2020, (5): 11-13.

    [18] [18] Shao J, Ma D, Zhang H, et al. An in situ method for diagnosing phase shifting interferometry[J]. Journal of Instrumentation, 2016, 11(5): 5018.

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    ZHAI Tian-bao, ZHONG Ping, LI Zhi-song, SU Shu, LI Niu-qi. Vibration Detection Method of Phase-Shifting Laser Interferometer Based on Interference Image Analysis[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2021, 19(1): 33

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    Paper Information

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    Received: Jun. 5, 2020

    Accepted: --

    Published Online: Aug. 19, 2021

    The Author Email: Tian-bao ZHAI (zhaitianbaodhu@163.com)

    DOI:

    CSTR:32186.14.

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