OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 18, Issue 5, 22(2020)
HighPrecisionMicroDisplacementMeasurementSystem BasedonPSD
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ZHOUSen, ZHANGZhi-wei, CAIRui-bo. HighPrecisionMicroDisplacementMeasurementSystem BasedonPSD[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2020, 18(5): 22
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Received: Jan. 14, 2020
Accepted: --
Published Online: Jan. 14, 2021
The Author Email: ZHOUSen (291356449@qq.com)
CSTR:32186.14.
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