OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 18, Issue 5, 22(2020)

HighPrecisionMicroDisplacementMeasurementSystem BasedonPSD

ZHOUSen1、*, ZHANGZhi-wei1,2, and CAIRui-bo1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    In order to realize the accurate measurement of Goos-Hanchen displacement,a displacement measurement system based on one-dimensional PSD is designed. According to the principle and characteristics of PSD,the following signal processing circuit is designed. STC89C52 collects the position signal output by PSD through 12 bit AD chip TLC2578,andthentransmitsittoLCD1602throughprocessing,andthentransmitsitthroughUSBinterface,anddisplays the displacement value in two ways. The measurement is completed. The experimental results show that the measurement accuracyofthesysteminthe centerisverygood,andthemeasurement accuracyoftheedgeislow,themeasurementerror is within ±10 μm. The system can be used not only in the measurement of Goos-Hanchen displacement,but also in other experimentsofmicrodisplacementmeasurement.

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    ZHOUSen, ZHANGZhi-wei, CAIRui-bo. HighPrecisionMicroDisplacementMeasurementSystem BasedonPSD[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2020, 18(5): 22

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    Paper Information

    Category:

    Received: Jan. 14, 2020

    Accepted: --

    Published Online: Jan. 14, 2021

    The Author Email: ZHOUSen (291356449@qq.com)

    DOI:

    CSTR:32186.14.

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