Researching | Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques

Chinese Optics Letters, Volume. 8, Issue s1, 62(2010)

Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques

H. Ehlers, S. Schlichting, C. Schmitz, and D. Ristau

Author Affiliations

Laser Zentrum Hannover, Hollerithallee 8, 30419 Hannover, Germany

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References(7)

[1] [1] D. Ristau, M. Lappschies, S. Schlichting, and H. Ehlers, Proc. SPIE 7101, 71010C (2008).

[2] [2] A. V. Tikhonravov and M. K. Trubetskov, Appl. Opt. 44, 6877 (2005).

[3] [3] D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, Appl. Opt. 45, 1495 (2006).

[4] [4] O. Stenzel, S. Wilbrandt, D. Fasold, and N. Kaiser, J. Opt. A 10, 085305 (2008).

[5] [5] M. Lappschies, B. G¨ortz, and D. Ristau, Appl. Opt. 45, 1502 (2006).

[6] [6] H. A. Macleod, Thin-Film Optical Filters (3rd edn.) (Inst. of Physics Pub., Bristol, 2001).

[7] [7] M. Lappschies, P. Pfeifer, U. Schallenberg, H. Ehlers, and D. Ristau, Proc. SPIE 7101, 71010P (2008).

CLP Journals

[1] Detlev Ristau, Henrik Ehlers, "Advanced control and modeling of deposition processes," Chin. Opt. Lett. 11, S10203 (2013)

Cited By

[1] H. Ehlers, D. Ristau. Optical Thin Films and Coatings, 94(2013).

[2] Carsten Schmitz, Henrik Ehlers, Detlev Ristau. Advanced error identification in deposition of complex optical layer systems by a multianalyzing approach. Applied Optics, 51, 8203(2012).

[3] A. V. Tikhonravov, A. Gorokh. Modified sequential algorithm for the on-line characterization of optical coatings. Optics Express, 23, 23561(2015).

[4] Henrik Ehlers, Detlev Ristau. Optical Thin Films and Coatings, 103(2018).

[5] Tatiana V. Amotchkina, Sebastian Schlichting, Henrik Ehlers, Michael K. Trubetskov, Alexander V. Tikhonravov, Detlev Ristau. Computational manufacturing as a key element in the design–production chain for modern multilayer coatings. Applied Optics, 51, 7604(2012).

[6] David Hofman, Benoit Sassolas, Christophe Michel, Laurent Balzarini, Laurent Pinard, Julien Teillon, Bertrand David, Bernard Lagrange, Eleonore Barthelemy-Mazot, Gianpietro Cagnoli. Photometric calibration of an in situ broadband optical thickness monitoring of thin films in a large vacuum chamber. Applied Optics, 56, 409(2017).

[7] Tatiana V. Amotchkina, Michael K. Trubetskov, Alexander V. Tikhonravov, Sebastian Schlichting, Henrik Ehlers, Detlev Ristau, David Death, Robert J. Francis, Vladimir Pervak. Quality control of oblique incidence optical coatings based on normal incidence measurement data. Optics Express, 21, 21508(2013).

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H. Ehlers, S. Schlichting, C. Schmitz, D. Ristau, "Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques," Chin. Opt. Lett. 8, 62 (2010)

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Paper Information

Received: Oct. 30, 2009

Accepted: --

Published Online: May. 14, 2010

The Author Email:

DOI:10.3788/COL201008s1.0062

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology