Chinese Optics Letters, Volume. 8, Issue s1, 62(2010)

Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques

H. Ehlers, S. Schlichting, C. Schmitz, and D. Ristau
Author Affiliations
  • Laser Zentrum Hannover, Hollerithallee 8, 30419 Hannover, Germany
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    The challenge in rapid production of high-precision optical coatings is the need to realize a variety of complex coating designs in one process environment. Two approaches to enhance a stable deposition process are presented. First, a virtual deposition system is applied for a pre-selection of coating designs that result in increased process stability using optical broadband monitoring strategies. Second, optical broadband monitoring is combined with additional quartz crystal sensors to realize a hybrid process control for improving layer thickness accuracy. Finally, a successful combination of both approaches is demonstrated by comparative studies on virtual and real deposition processes.

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    H. Ehlers, S. Schlichting, C. Schmitz, D. Ristau, "Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques," Chin. Opt. Lett. 8, 62 (2010)

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    Paper Information

    Received: Oct. 30, 2009

    Accepted: --

    Published Online: May. 14, 2010

    The Author Email:

    DOI:10.3788/COL201008s1.0062

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