Chinese Optics Letters, Volume. 8, Issue s1, 62(2010)
Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques
The challenge in rapid production of high-precision optical coatings is the need to realize a variety of complex coating designs in one process environment. Two approaches to enhance a stable deposition process are presented. First, a virtual deposition system is applied for a pre-selection of coating designs that result in increased process stability using optical broadband monitoring strategies. Second, optical broadband monitoring is combined with additional quartz crystal sensors to realize a hybrid process control for improving layer thickness accuracy. Finally, a successful combination of both approaches is demonstrated by comparative studies on virtual and real deposition processes.
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H. Ehlers, S. Schlichting, C. Schmitz, D. Ristau, "Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques," Chin. Opt. Lett. 8, 62 (2010)
Received: Oct. 30, 2009
Accepted: --
Published Online: May. 14, 2010
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