Acta Optica Sinica, Volume. 31, Issue 10, 1016003(2011)
Investigation of Ga-Assisted Desorption of Native Surface Oxide on GaAs Substrate
[4] [4] M. P. Grimshaw, D. A. Ritchie, J. H. Burroughes et al.. Effect of the proximity of an ex-situ patterned interface on the quality of two-dimensional electron gases at GaAs/AlGaAs heterojunctions [J]. J. Vac. Sci. Technol. B, 1994, 12(2): 1290~1292
[5] [5] S. Sugata, A. Takamori, N. Takado et al.. GaAs cleaning with a hydrogen radical beam gun in an ultrahigh-vacuum system[J]. J. Vac. Sci. Technol. B, 1988, 6(4): 1087~1091
[6] [6] Z. R. Wasilewski, J.-M. Baribeau, M. Beaulieu et al.. Studies of oxide desorption from GaAs substrates via Ga2O3 to Ga2O conversion by exposure to Ga flux [J]. J. Vac. Sci. Technol. B, 2004, 22(3): 1534~1538
[7] [7] A. Ballestad, B. J. Ruck, M. Adamcyk et al.. Evidence from the surface morphology for nonlinear growth of epitaxial GaAs films [J]. Phys. Rev. Lett., 2001, 86(11): 2377~2380
[8] [8] M. Yamada, Y. Ide, K. Tone. Effect of atomic hydrogen on GaAs (001) surface oxide studied by temperature-programmed desorption[J]. Jpn. J. Appl. Phys., 1992, 31(8B): L1157~L1160
[9] [9] E. J. Petit, F. Houzay. Optimal surface cleaning of GaAs (001) with atomic hydrogen [J]. J. Vac. Sci. Technol. B, 1994, 12(2): 547~550
[10] [10] P. Tomkiewicz, A. Winkler, J. Szuber. Comparative study of the GaAs(100) surface cleaned by atomic hydrogen [J]. Appl. Surf. Sci., 2006, 252(21): 7647~7658
[11] [11] F. Proix, C. A. Sebenne, M. Cherchour et al.. Hydrogen-induced contamination of III-V compound surfaces[J]. J. Appl. Phys., 1998, 64(2): 898~902
[12] [12] Y. Asaoka. Corrigendum to “desorption process of GaAs surface native oxide controlled by direct Ga beam irradiation”[J]. J. Cryst. Growth, 2003, 251(1-4): 40~43
[13] [13] J. H. Lee, Z. M. Wang, G. J. Salamo. Survival of atomic monolayer steps during oxide desorption on GaAs (100)[J]. J. Appl. Phys., 2006, 100(11): 114330
[14] [14] F. Bastiman, R. Hogg, M. Skolnick et al.. InAs/GaAs(001) molecular beam epitaxial growth in a scanning tunnelling microscope [J]. J. Phys. Conference Series, 2010, 209(1): 012066
[15] [15] P. Atkinson, O. G. Schmidt. Gallium-assisted deoxidation of patterned substrates for site-controlled growth of InAs quantum dots [J]. J. Cryst. Growth, 2009, 311(7): 1815~1818
[16] [16] P. Atkinson, O. G. Schmidt, S. P. Bremner et al.. Formation and ordering of epitaxial quantum dots [J]. Comptes Rendus Physique, 2008, 9(8): 788~803
[17] [17] P. Atkinson, S. Kiravittaya, M. Benyoucef et al.. Site-controlled growth and luminescence of InAs quantum dots using in situ Ga-assisted deoxidation of patterned substrates [J]. Appl. Phys. Lett., 2008, 93(10): 101908
[18] [18] J. R. Roth. Applications to Nonthermal Plasma Processing [M]. London: The Institute of Physics, 2001
[19] [19] L. H. Li, N. Chauvin, G. Patriarche et al.. Growth-interruption-induced low-density InAs quantum dots on GaAs [J]. J. Appl. Phys., 2008, 104(8): 083508
[20] [20] B. Alloing, C. Zinoni, V. Zwiller et al.. Growth and characterization of single quantum dots emitting at 1300 nm [J]. Appl. Phys. Lett., 2005, 86(10): 101908
Get Citation
Copy Citation Text
Li Zhanguo, Liu Guojun, You Minghui, Li Lin, Li Hui, Feng Ming, Li Mei, Gao Xin, Li Lianhe. Investigation of Ga-Assisted Desorption of Native Surface Oxide on GaAs Substrate[J]. Acta Optica Sinica, 2011, 31(10): 1016003
Category: Materials
Received: Apr. 1, 2011
Accepted: --
Published Online: Sep. 20, 2011
The Author Email: Zhanguo Li (lzhg000@yahoo.com.cn)