Fig. 1. Simulation of micro-displacement measurement based on interference theory of conjugated vortex beams

Fig. 2. VirtualLab software conjugated vortex beams interference simulation

Fig. 3. Experimental setup for measuring micro-displacement of objects based on conjugated vortex beams interferometry

Fig. 4. Interference pattern before and after 100 nm displacement with image processing

Fig. 5. Interference pattern before and after 200 nm displacement with image processing

Fig. 6. Interference pattern before and after 250 nm displacement with image processing

Fig. 7. Comparison of relative errors under different displacements